Liquid Supply Apparatus Exhaust Port Segmentation for Imprint Precision
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Solution Overview
Problem
Heat generated by liquid discharge apparatuses in imprint systems can deform substrates and molds, and reduce measurement precision, particularly in applications like 2D or 3D printing, where precise alignment is critical.
Innovation Solution
A liquid supply apparatus with a discharger that includes a driving mechanism to position the discharger at multiple locations, and dedicated exhaust ports to effectively remove heat generated by the discharger, ensuring efficient cooling and maintaining precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single exhaust port is used for a movable discharger, then the apparatus structure is simplified, but heat removal efficiency deteriorates when the discharger moves to different positions
Solution Approach 1:
The exhaust system is segmented into multiple exhaust ports (first exhaust port and second exhaust port) corresponding to different discharger positions. Each exhaust port is dedicated to exhausting heat from specific positions, ensuring effective heat removal regardless of where the discharger is located.
Solution Approach 2:
The exhaust port configuration is made dynamic by linking the selection of exhaust port to the position of the discharger. The system adapts its exhaust configuration based on the discharger's location, switching between the first exhaust port when at the first position and the second exhaust port when at the second position.
2Device complexity
If the discharger is fixed at one position, then the exhaust system is simpler, but the liquid supply apparatus loses flexibility in positioning
Solution Approach 1:
The exhaust system is designed with multi-functionality to handle multiple discharger positions. The first exhaust port and second exhaust port together form a universal exhaust system that can effectively exhaust heat regardless of which position the discharger occupies, making the system adaptable to different operational configurations.
Solution Approach 2:
The system dynamically adapts its exhaust configuration based on the discharger's position. The driving mechanism that positions the discharger is linked with the exhaust port selection, enabling the system to maintain effective heat removal across different operational states and positions.
3Device complexity
If heat is not effectively removed, then the apparatus structure is simpler, but substrate and mold deformation occurs
Solution Approach 1:
The heat management system is segmented into position-specific exhaust ports. The first exhaust port handles heat removal when the discharger is at the first position, and the second exhaust port handles heat removal when the discharger is at the second position, ensuring comprehensive thermal management across all operational positions.
Solution Approach 2:
The system incorporates feedback by linking the discharger position (detected by the driving mechanism) with the selection of the appropriate exhaust port. This feedback mechanism ensures that the correct exhaust port is activated based on the current position, maintaining optimal heat removal and preventing thermal deformation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces heat-related deformations and precision issues, enabling high-precision pattern formation on substrates by actively managing and exhausting heat generated during the liquid discharge process.
Implementation Method 1
a first exhaust port arranged so as to face the discharger arranged at the first position and configured to exhaust heat generated by the discharger arranged at the first position
Data Source
AI summary
A liquid supply apparatus which supplies a liquid to an object, includes a discharger configured to discharge a liquid; a driving mechanism configured to arrange the discharger at a plurality of positions including a first position and a second position; a first exhaust port arranged so as to face the discharger arranged at the first position and configured to exhaust heat generated by the discharger arranged at the first position; and a second exhaust port arranged so as to face the discharger arranged at the second position and configured to exhaust heat generated by the discharger arranged at the second position.