Liquid Processing Exhaust System Pressure Stabilization
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Solution Overview
Problem
Conventional liquid processing apparatuses face challenges in maintaining consistent pressure across multiple liquid processing units, leading to fluctuations during increased exhaust operations.
Innovation Solution
The apparatus incorporates individual exhaust paths connected to a common exhaust path, with first and second outside air intake sections and regulation valves, allowing for controlled outside air introduction to manage exhaust gas flow and stabilize pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a common exhaust path is used for multiple liquid processing units, then device complexity is reduced, but pressure stability deteriorates due to fluctuations during liquid processing
Solution Approach 1:
The exhaust system is segmented into multiple independent exhaust paths, each dedicated to a specific liquid processing unit. This segmentation allows each unit to maintain stable pressure independently while still utilizing a common exhaust infrastructure, resolving the contradiction between simplified device complexity and pressure stability.
Solution Approach 2:
A flow rate regulation mechanism acts as an intermediary between the liquid processing units and the common exhaust path. This intermediary controls and stabilizes the exhaust flow rate, preventing pressure fluctuations in individual units while maintaining the benefits of a shared exhaust system.
2Productivity
If exhaust amount is increased to handle more processing units, then productivity is improved, but pressure fluctuation worsens
Solution Approach 1:
The exhaust system incorporates dynamic flow rate regulation that adapts to varying processing conditions. As productivity increases and more units operate simultaneously, the system dynamically adjusts exhaust flow rates to maintain pressure stability, allowing high productivity without sacrificing pressure control.
Solution Approach 2:
The system changes operational parameters (exhaust flow rate, valve openings) based on the number of active processing units and their individual states. This parameter adjustment allows the system to handle increased productivity while maintaining stable pressure conditions in each unit.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses pressure fluctuations across liquid processing units by dynamically adjusting air intake based on exhaust amounts, ensuring consistent operation.
Implementation Method 1
The first outside air intake section is formed at a most upstream side, in the common exhaust path in a flow direction of the exhaust gas, from a plurality of connection regions, to which the individual exhaust paths are connected, and introduces outside air into the common exhaust path
Implementation Method 2
The first regulation valve is provided between the first outside air intake section and the connection region, which is located at a most upstream side among the connection regions, and regulates a flow rate of the outside air introduced from the first outside air intake section
Data Source
AI summary
A liquid processing apparatus includes a plurality of liquid processing units, a plurality of individual exhaust paths, a common exhaust path, a first outside air intake section, a first regulation valve, a second outside air intake section, and a second regulation valve. The liquid processing units perform a liquid processing on a processing target object. An exhaust gas from an inside of the liquid processing unit flows in the individual exhaust paths. The exhaust gas from the individual exhaust paths flows in the common exhaust path. The first outside air intake section is formed at the most upstream side to introduce outside air. The first regulation valve is provided in the first outside air intake section. The second outside air intake section is formed at a downstream side of the common exhaust path from the connection. The second regulation valve is provided in the second outside air intake section.