Liquid Feeding Device Standby Mode Sealing
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Solution Overview
Problem
Treatment liquids in liquid feeding devices for substrate manufacturing degrade quickly when not in use, leading to premature disposal and increased costs due to exposure and lack of effective preservation methods.
Innovation Solution
A liquid feeding device with multiple tanks that can switch between feeding and standby modes, featuring a feeding mechanism, recovery mechanism, and on-off mechanisms for exhaust and overflow lines to prevent degradation by isolating the treatment liquid from the atmosphere and implementing internal circulation and replenishment systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the feeding tank is left open with exhaust passage and overflow line exposed to the atmosphere, then the treatment liquid can be fed and recovered, but the treatment liquid degrades quickly due to exposure to air
Solution Approach 1:
The system divides the feeding tank operation into distinct phases: feeding mode where the tank is open for liquid transfer, and standby mode where the tank is sealed to prevent degradation. This segmentation allows the tank to fulfill both operational requirements and preservation requirements at different times.
Solution Approach 2:
The exhaust passage and overflow line are equipped with dynamic on-off mechanisms that can switch between open and closed states. During feeding operation, these passages are open; during standby, they are closed. This dynamic adjustment resolves the contradiction between needing open access for operation and closed sealing for preservation.
2Reliability
If the treatment liquid is periodically circulated by a pump in the standby tank, then the liquid can be kept moving, but the liquid still degrades with passage of time and use
Solution Approach 1:
By sealing the feeding tank during standby mode, the treatment liquid is isolated from atmospheric exposure. This creates a protected environment that prevents oxidation and contamination, significantly extending the liquid's usable life regardless of whether it is circulated or stationary.
Solution Approach 2:
The system switches to sealed standby mode immediately after feeding operation completes, preventing degradation before it can occur. This preliminary protective action ensures the liquid is preserved from the moment operation ends, maximizing its service life for the next feeding cycle.
3Productivity
If two feeding tanks are provided and one is used at a time, then continuous operation is possible, but the standby tank still requires periodic circulation and eventual disposal of degraded liquid
Solution Approach 1:
The system segments the tank operation into active feeding mode and sealed standby mode. This allows one tank to be fully utilized while the other is preserved in a sealed state, preventing the standby tank from degrading and requiring disposal. The segmentation eliminates the need to discard preserved liquid.
Solution Approach 2:
By implementing sealed standby mode, the system recovers and preserves treatment liquid that would otherwise be discarded. The on-off mechanisms prevent degradation, allowing the liquid to be reused in subsequent feeding operations, thereby reducing substance loss and waste.
Data Source
AI summary
A liquid feeding device that feeds a treatment liquid to a treating device and also recovers the treatment liquid for re-feeding, include feeding tanks having an exhaust passage and an overflow line, and can be switched to one of a feeding mode in which the treatment liquid is fed and a standby mode in which the feeding tank is on standby while accommodating the treatment liquid; a feeding mechanism that feeds the treatment liquid to the treating device from the feeding tank in the feeding mode among the plurality of feeding tanks; a recovery mechanism that recovers and returns the treatment liquid excessive in the treatment device to the feeding tank in the feeding mode; and an on-off mechanism provided in each of the plurality of feeding tanks to block the exhaust passage and the overflow line is provided.