Liquid Immersion Member Bubble Prevention
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Solution Overview
Problem
In liquid immersion exposure apparatuses, exposure failures can occur due to changes in optical members or the presence of bubbles in the liquid, leading to defective device manufacturing.
Innovation Solution
A liquid immersion member and exposure apparatus design that forms a liquid immersion space between the optical path of the exposure light and the substrate, using a configuration of first and second members to prevent exposure failures by maintaining a stable liquid environment, with a liquid supply and recovery system to manage the liquid effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a liquid immersion exposure apparatus is used to improve manufacturing precision, then exposure quality is improved, but exposure failures occur due to bubbles or optical member changes
Solution Approach 1:
The patent applies preliminary action by detecting changes in optical members and bubble presence in the liquid immersion space before they cause exposure failures. The detection system monitors the liquid immersion space and optical members proactively, allowing the system to take preventive measures such as adjusting exposure parameters or removing bubbles before they affect the exposure process, thus maintaining both high manufacturing precision and reliability
Solution Approach 2:
The patent implements feedback mechanisms by continuously monitoring the liquid immersion space for bubbles and detecting changes in optical members. The detection results are fed back to the control system, which automatically adjusts exposure parameters or triggers corrective actions. This closed-loop feedback ensures that exposure quality is maintained while preventing exposure failures caused by bubbles or optical member degradation
2Adaptability or versatility
If optical members are changed or liquid conditions vary, then adaptability is improved, but exposure stability deteriorates leading to defective devices
Solution Approach 1:
The patent uses feedback control to detect changes in optical members and liquid conditions, then automatically adjusts exposure parameters to compensate. This allows the system to adapt to different optical members and liquid conditions while maintaining consistent exposure results, resolving the contradiction between adaptability and stability
Solution Approach 2:
The patent applies parameter changes by dynamically adjusting exposure parameters based on detected conditions such as optical member characteristics and liquid immersion space quality. The system modifies exposure parameters in real-time to compensate for changes, ensuring consistent exposure results across different operating conditions and preventing defective device production
Data Source
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AI summary
A liquid immersion member is used in a liquid immersion exposure apparatus which exposes a substrate by exposure light via a first liquid between an emitting surface of an optical member and the substrate, and is capable of forming a liquid immersion space on an object movable below the optical member. The liquid immersion member includes a first member that is disposed at at least a portion of surrounding of the optical member; a second member that is capable of being opposite to the object and is movable outside an optical path of the exposure light; and a protection part that protects the optical member. The protection part decreases a change in pressure which the optical member receives from the liquid in the liquid immersion space.