Liquid Jet Head Substrate Segmentation for Yield
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Solution Overview
Problem
Existing liquid jet heads and apparatuses face challenges with low yield, high manufacturing costs, and poor print quality due to the mechanical strength reduction of silicon wafers when increasing pressure chamber numbers, and adhesive flow into pressure chambers affecting print quality.
Innovation Solution
The method involves forming pressure chambers and a common chamber on a substrate's surface, using a bonding process to create a transition layer, and photo-etching to form jet orifices on the jet orifice plate, preventing adhesive flow and maintaining substrate strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the number of pressure chambers is increased to improve print resolution, then the print resolution is improved, but the mechanical strength of the substrate is reduced and the substrate is broken readily
Solution Approach 1:
The substrate is divided into multiple isolated pressure chambers, each with its own piezoelectric element and jet orifice. This segmentation allows increasing the number of chambers without compromising the overall structural integrity of the substrate, as each chamber acts as an independent unit with sufficient wall thickness to maintain strength.
Solution Approach 2:
The substrate structure is optimized locally at each pressure chamber position, with chamber walls designed to have sufficient thickness for mechanical strength while maintaining close spacing for high resolution. The local geometry allows each chamber to bear its own structural load independently.
2Measurement precision
If the number of pressure chambers is increased to improve print resolution, then the print resolution is improved, but the yield is reduced due to substrate breakage
Solution Approach 1:
By segmenting the substrate into multiple independent pressure chambers with adequate wall thickness, the structural strength is maintained even when increasing the number of chambers. This reduces manufacturing defects and substrate breakage, thereby improving yield while achieving high print resolution.
3Ease of manufacture
If adhesive is used to bond the jet orifice plate to the substrate, then the jet orifice plate is secured, but the adhesive may flow into the pressure chamber and affect print quality
Solution Approach 1:
A sealing structure is introduced as an intermediary element between the jet orifice plate and the pressure chamber. This sealing structure prevents adhesive from flowing into the pressure chamber during the bonding process, while still allowing the jet orifice plate to be securely bonded to the substrate. The seal acts as a barrier that maintains print quality.
4Measurement precision
If the sidewall thickness of adjacent pressure chambers is reduced to increase the number of chambers, then the print resolution is improved, but the mechanical strength is decreased
Solution Approach 1:
The pressure chambers are designed as segmented, isolated units with optimized wall thickness. Each chamber is sufficiently thick-walled to maintain mechanical strength independently, while the segmentation allows close spacing of chambers to achieve high print resolution without requiring the entire substrate wall to be thin.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the mechanical strength of the substrate, reduces manufacturing costs, and improves print quality by preventing adhesive flow into pressure chambers.
Implementation Method 1
the piezoelectric element is deformed under driving of a voltage, and the deformation is transferred to the vibrating plate
Data Source
AI summary
A liquid jet head manufacturing method, a method for integrally manufacturing a liquid jet apparatus, a liquid jet head, a printing apparatus and a liquid jet apparatus. The manufacturing method includes: forming multiple pressure-generating members arranged spaced apart on a first substrate; forming, on a first surface of first substrate, pressure chambers corresponding to multiple pressure-generating members, and a common chamber in communication with multiple pressure chambers; forming a transition layer on pressure chambers, and forming a jet orifice plate on transition layer; and forming, on jet orifice plate and transition layer, jet orifices in communication with pressure chambers. When the number of pressure chambers needs to be increased, since pressure chambers are formed on first substrate individually, mechanical strength of first substrate will not be reduced, and during manufacturing process, breakage of first substrate can be avoided, improving yield of liquid jet head, and reducing manufacturing cost.