Liquid Landing Position Control via Thermal Feedback
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Solution Overview
Problem
Existing substrate liquid processing apparatuses face challenges in accurately controlling the landing position of liquids on substrates due to deviations in liquid discharge, which can be caused by nozzle misalignment, pipeline misconnection, and improper discharge direction.
Innovation Solution
The apparatus includes a substrate holder, a rotating device, a liquid supply system with a nozzle moving device, a temperature measurement device, and a controller. The controller adjusts the landing position of the liquid by moving the nozzle along different paths and derives discharge position deviation information by comparing temperature measurements, allowing for precise control of liquid placement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the nozzle moves along a fixed path to discharge liquid, then the liquid discharge process is simple and fast, but the landing position accuracy deteriorates due to discharge position deviation
Solution Approach 1:
The system uses a temperature measurement device to detect the actual liquid landing position by measuring temperature changes on the substrate. This feedback information is fed back to the controller, which then adjusts the nozzle's movement path or discharge timing to compensate for position deviations, forming a closed-loop control system that improves landing accuracy without requiring complex mechanical precision
Solution Approach 2:
Instead of relying solely on complex mechanical positioning systems to achieve high landing accuracy, the patent substitutes mechanical control with thermal field detection and control-based compensation. The temperature measurement device replaces complex mechanical position sensors, and the controller's computational compensation replaces complex mechanical positioning mechanisms
2Manufacturing precision
If the nozzle path is adjusted to compensate for discharge position deviation, then the liquid landing position accuracy improves, but the processing time increases due to path adjustments
Solution Approach 1:
The system performs preliminary measurement of discharge position deviation using the temperature measurement device before the actual liquid discharge process. By obtaining the deviation information in advance, the controller can pre-calculate the corrected nozzle path, allowing the liquid discharge to proceed efficiently without real-time path adjustments that would slow down processing
Solution Approach 2:
The nozzle movement path is made dynamic and adaptive rather than fixed. The controller adjusts the nozzle path based on measured temperature field data, allowing the system to optimize between accuracy and speed for different processing conditions. This dynamic adjustment enables efficient processing by avoiding unnecessary conservative path adjustments
3Measurement precision
If temperature measurement is performed at multiple points to improve position accuracy, then the discharge position deviation detection accuracy improves, but the measurement complexity and time increase
Solution Approach 1:
The temperature measurement device serves multiple functions: it measures the substrate temperature distribution to detect liquid landing position, characterizes the temperature field for deviation detection, and provides feedback for control adjustment. This multi-functionality allows the system to achieve high measurement precision with a single versatile device rather than multiple specialized sensors
Solution Approach 2:
The system uses changes in temperature parameters (temperature distribution, temperature gradient, temperature change rate) to detect discharge position deviation. By analyzing multiple temperature parameters from a single measurement device rather than requiring multiple position sensors, the system achieves high detection accuracy without increasing device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables accurate and continuous adjustment of the liquid landing position on the substrate, reducing deviations and improving the reliability of the liquid discharge process, thereby enhancing the overall processing efficiency and quality.
Implementation Method 1
a temperature measurement device (20) configured to measure a spot temperature which is at least one of a temperature of a specific spot on a surface of the substrate W or a temperature of the liquid on the specific spot
Data Source
AI summary
A controller is configured to control a liquid supply to change a landing position of a liquid on a surface of a substrate continuously by discharging the liquid toward the surface of the substrate from a first liquid discharge nozzle while moving the first liquid discharge nozzle. The controller is also configured to derive discharge position deviation information of the liquid supply by comparing first temperature information based on a spot temperature measured by a temperature measurement device when the first liquid discharge nozzle is moved along a first nozzle path and second temperature information based on the spot temperature measured by the temperature measurement device when the first liquid discharge nozzle is moved along a second nozzle path which is different from the first nozzle path.