Liquid Level Sensor Energy Control Near Vacuum Tanks
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Solution Overview
Problem
Self-heating liquid level sensors in vaporization systems for semiconductor manufacturing experience rapid temperature rises as the tank approaches a vacuum atmosphere, leading to reduced lifespan, deformation, and shifted detection values.
Innovation Solution
A material supply system with a monitoring portion and energy control portion that adjusts the energy supplied to the liquid level sensor from normal to low-level energy when detection values reach predetermined limits, preventing rapid temperature increases and allowing continued monitoring for appropriate energy restoration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a self-heating type liquid level sensor is used to detect liquid surface, then liquid level detection is achieved, but the sensor temperature rises rapidly when the tank approaches vacuum atmosphere
Solution Approach 1:
The patent applies dynamics by making the energy supply to the liquid level sensor adjustable rather than fixed. The energy control portion dynamically changes the energy level from normal energy to low-level energy based on real-time temperature monitoring, allowing the sensor to adapt its operating conditions to prevent overheating in vacuum atmosphere while maintaining detection capability.
Solution Approach 2:
The patent changes the energy supply parameter to the liquid level sensor based on temperature conditions. When the sensor temperature approaches a predetermined threshold, the system transitions from supplying normal energy to supplying low-level energy, thereby controlling the temperature rise while maintaining the sensor's liquid level detection function.
2Speed
If normal energy is continuously supplied to the liquid level sensor, then detection responsiveness is maintained, but the sensor lifespan decreases and deformation occurs
Solution Approach 1:
The system dynamically adjusts energy supply based on temperature feedback. The monitoring portion continuously tracks sensor temperature, and when it approaches the threshold, the energy control portion reduces energy to low-level, preventing thermal damage while maintaining detection functionality. This dynamic adjustment preserves sensor lifespan without permanently sacrificing responsiveness.
Solution Approach 2:
The patent implements feedback control where the monitoring portion continuously monitors sensor temperature and feeds this information back to the energy control portion. This closed-loop feedback system allows the sensor to operate at normal energy levels when safe, maintaining responsiveness, while automatically reducing to low-level energy when temperature thresholds are approached, protecting sensor lifespan.
3Temperature
If energy supply is stopped when temperature limit is reached, then temperature rise is prevented, but temperature detection becomes impossible
Solution Approach 1:
The system dynamically adjusts energy supply to low-level rather than stopping completely. This maintains the sensor's self-heating function and temperature detection capability while preventing excessive temperature rise. The sensor continues to operate and provide temperature feedback, avoiding loss of detection information.
Solution Approach 2:
Instead of completely stopping energy supply (excessive action), the system applies partial energy (low-level energy) that is sufficient to maintain detection functionality and temperature monitoring but insufficient to cause harmful temperature rise. This partial action preserves temperature detection capability while achieving temperature control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents rapid temperature rises in liquid level sensors, reducing issues like lifespan decrease, deformation, and detection value shifts, while maintaining responsiveness and enabling accurate temperature calculation.
Implementation Method 1
a self-heating type of sensor that generates heat when supplied with a constant current
Implementation Method 2
as the vaporization of the liquid material proceeds so that the interior of the tank comes close to being a vacuum atmosphere
Data Source
AI summary
A rapid rise in the temperature of a liquid level sensor is prevented even at close to a vacuum atmosphere. In a material supply system that is equipped with a tank containing a liquid material and with the liquid level sensor that is provided inside the tank, and in which the liquid level sensor is a self-heating type of sensor that, when the liquid level sensor is generating heat as a result of being supplied with a predetermined normal energy, detects a liquid surface, there are provided a monitoring portion that monitors a detection value from an output signal from the liquid level sensor, and an energy control portion that, when the monitored detection value reaches a predetermined upper limit value, performs control in such a way that the energy supplied to the liquid level sensor is low-level energy that is lower than the normal energy.