Liquid Material Arrangement via Nozzle Check and Dot Pattern Selection

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Solution Overview

Problem

Existing liquid material arrangement methods using droplet discharge face challenges in precision due to nozzle characteristic variations, leading to improper droplet placement and uneven material distribution in partitioned regions.

Innovation Solution

A method that involves acquiring discharge information from nozzles to generate a second dot pattern by selecting non-discharge dots from a first dot pattern, ensuring precise arrangement of liquid material in prescribed regions based on the acquired data.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a standard dot pattern is used for liquid material arrangement, then the manufacturing process is simple, but nozzle characteristic variations cause droplets to land outside partitioned regions and create uneven distribution

Engineering Contradiction:
Improveliquid material arrangement precisionVSAvoidpattern generation complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent performs a nozzle check before actual liquid material arrangement to acquire discharge information (landing position and discharge quantity) for each nozzle. Based on this preliminary measurement, a corrected dot pattern is generated that compensates for individual nozzle variations. This preliminary action ensures that even though nozzles have characteristic variations, the liquid material is arranged with high precision in the partitioned regions.

Inventive Principle:
Principle #10Preliminary action

2Manufacturing precision

If discharge control is performed without nozzle check, then the process is fast, but improper droplet flight direction and fluctuation in discharged quantity reduce arrangement precision

Engineering Contradiction:
Improvedroplet placement precisionVSAvoidnozzle check time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent implements a feedback mechanism where the landing position and discharge quantity of each nozzle are measured during a nozzle check. This measured discharge information is then used to generate a corrected dot pattern that compensates for the actual nozzle characteristics. The feedback loop ensures that the subsequent liquid material arrangement achieves high precision by adapting the pattern to the actual nozzle performance rather than assuming ideal conditions.

Inventive Principle:
Principle #23Feedback

Data Source

PatentUS8668951B2Liquid material arrangement method, color filter manufacturing method, and organic EL display device manufacturing method
Publication Date: 2014.03.11 TOKYO ELECTRON LTD
  • US8668951B2 patent drawing
  • US8668951B2 patent drawing
  • US8668951B2 patent drawing

AI summary

A liquid material arrangement method is a method for arranging a liquid material in a plurality of prescribed regions on a substrate by discharging the liquid material as a droplet from a nozzle. The liquid material arrangement method includes: performing a discharge information acquiring step for acquiring discharge information of the nozzle including a landing position and a discharge quantity of the droplet discharged from the nozzle by a nozzle check; performing a second pattern generating step for generating a second dot pattern, which is an arrangement pattern for arranging a prescribed number of droplets, by selecting at least one non-discharge dot from a first dot pattern, which is an arrangement pattern for arranging more droplets than the prescribed number of droplets, based on the discharge information; and performing a liquid material arranging step for arranging the liquid material in the prescribed regions based on the second dot pattern.