Liquid Medicine Flow Path Sealing for Thermal Deformation Resistance

Solution Overview

Problem

Existing temperature control devices for corrosive liquid medicines in semiconductor manufacturing face challenges in maintaining a reliable seal due to complex constructions and high manufacturing costs, with potential for thermal deformation leading to leakage and compromised sealing characteristics.

Innovation Solution

A simplified construction with integrally formed sealing projection portions on the flow path block and a rubber-elastic sealing auxiliary member, reducing the number of sealing points and enhancing the sealing surface's integrity, while using heat-transmitting plates and thermo-modules for temperature control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a sealing portion constructed by separately inserting fluorine resin into circular grooves is used, then chemical resistance is improved, but device complexity increases and manufacturing cost rises

Engineering Contradiction:

Improvesealing characteristicVSAvoidstructure of sealing portion

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The sealing projection portion is integrally formed with the flow path block as a single unified structure, eliminating the need for separate insertion of fluorine resin into grooves. This merging of components simplifies the overall structure while maintaining the chemical resistance benefits of fluorine resin throughout the sealing portion.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The sealing portion is divided into multiple sealing surfaces (first sealing surface and second sealing surface) that are formed on the flow path block, with the sealing projection portion extending from these surfaces. This segmentation allows for simplified integral formation while maintaining effective sealing at multiple locations.

Inventive Principle:

Principle #1Segmentation

2Reliability

If a sealing portion constructed by separately inserting fluorine resin into circular grooves is used, then chemical resistance is improved, but manufacturing cost increases

Engineering Contradiction:

Improvesealing characteristicVSAvoidmanufacture cost

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

The sealing projection portion is integrally formed with the flow path block as a single unified structure, eliminating the need for separate insertion of fluorine resin into grooves. This merging of components simplifies the overall structure while maintaining the chemical resistance benefits of fluorine resin throughout the sealing portion.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The flow path block itself provides the sealing function through its integrally formed sealing projection portion, eliminating the need for separate sealing components. The structure serves its own sealing needs, reducing manufacturing steps and costs.

Inventive Principle:

Principle #25Self-service

3Reliability

If sealing portion is constructed by separately inserting fluorine resin, then chemical resistance is improved, but thermal deformation causes misalignment and sealing failure

Engineering Contradiction:

Improvechemical resistanceVSAvoidalignment of sealing portion

Core Design Contradiction:

ReliabilityVSStability of the object's composition

Solution Approach 1:

The sealing projection portion is integrally formed with the flow path block as a single unified structure, eliminating the need for separate insertion of fluorine resin into grooves. This merging of components simplifies the overall structure while maintaining the chemical resistance benefits of fluorine resin throughout the sealing portion.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach improves sealing characteristics, reduces manufacturing costs, and minimizes thermal deformation-induced issues, ensuring effective temperature control and leak prevention during cooling or heating operations.

Implementation Method 1

contacting the corrosive liquid medicines for use in a semiconductor processing with a heat-transmitting plate where a thermo-module is in close contact therewith

Methodology Applied

Scientific EffectHeat conduction: Conduction (thermal)

Implementation Method 2

thermo-modules respectively disposed at outer surfaces of the heat-transmitting plates, and performing a cooling operation or a heating operation on the liquid medicines flowing through the groove-shaped flow paths via the heat-transmitting plates

Methodology Applied

Scientific EffectThermal energy transfer: Conduction (thermal)

Data Source

PatentUS8302408B2Temperature control device for liquid medicines

Publication Date: 2012.11.06 SMC CORP

AI summary

In a temperature control device for liquid medicines provided with a flow path block having flow paths for liquid medicines at both of front and back surfaces, heat-transmitting plates respectively disposed at both of the front and back surfaces of the flow path block in a manner so as to face the flow paths, and thermo-modules for performing a cooling operation or a heating operation on the liquid medicines that flows through the flow path via the heat-transmitting plates, respectively, at least one ridge of mountain-shaped sealing projection portion surrounding a periphery of the flow path are integrally formed with the flow path block at sealing surfaces respectively surrounding the flow paths at both of the front and back surfaces of the flow path block, and the heat-transmitting plates are fixed to the flow path block in a state of pressure-contacting the sealing projection portion.