Multi-Needle Liquid Metal Injection for High-Quality Interconnect Filling

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Solution Overview

Problem

Current manufacturing processes for liquid metal interconnects, such as squeegee printing, face challenges including low quality filling, low yield, and inability to scale, making them unsuitable for high-volume manufacturing due to high material wastage, air trapping, and increased electrical resistance from oxidation during repetitive strokes.

Innovation Solution

A direct injection system that uses a multi-needle injection head to accurately dispense liquid metal into specific locations within a substrate, minimizing material usage and oxidation by delivering precise volumes directly where needed, thereby enhancing filling quality and reducing waste.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If squeegee printing is used to fill liquid metal into holes, then the process can cover the substrate surface, but it causes high material wastage and air trapping leading to low filling quality

Engineering Contradiction:
Improvefilling qualityVSAvoidmaterial wastage
Core Design Contradiction:
Manufacturing precisionVSLoss of substance

Solution Approach 1:

The injection head is divided into multiple needles that can independently fill multiple holes simultaneously. This segmentation allows precise delivery of liquid metal directly into each hole without the material wastage and air trapping problems of squeegee printing, which applies material across the entire substrate surface.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The direct injection method delivers liquid metal locally and precisely into specific holes rather than covering the entire substrate surface. This localized approach improves filling quality by ensuring complete hole filling while reducing material wastage by eliminating excess material application and rework.

Inventive Principle:
Principle #3Local quality

2Reliability

If repetitive squeegee strokes are used to fill holes, then material can be forced into holes, but it increases oxidation and electrical resistance

Engineering Contradiction:
Improveelectrical conductivityVSAvoidoxidation during processing
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The liquid metal is delivered directly into the holes in a single injection action, completing the filling process before significant oxidation can occur. This eliminates the need for repetitive squeegee strokes that prolong exposure to air and increase oxidation, thereby maintaining electrical conductivity.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The direct injection method rapidly delivers liquid metal into the holes and completes the filling process quickly, minimizing the time liquid metal is exposed to air. This rushed-through approach prevents oxidation and maintains low electrical resistance, unlike slow repetitive squeegee strokes.

Inventive Principle:
Principle #21Skipping (Rushing through)

3Productivity

If conventional manufacturing processes are used, then liquid metal interconnects can be formed, but the process cannot be scaled for high-volume manufacturing

Engineering Contradiction:
Improvemanufacturing volumeVSAvoidfilling quality
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

Multiple needles are combined in a single injection head to fill multiple holes simultaneously, enabling scaling for high-volume manufacturing while maintaining consistent filling quality. This merging of multiple filling operations into one simultaneous action increases productivity without sacrificing precision.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The direct injection system with multiple needles can fill various hole patterns and configurations on substrates, making it a universal solution that scales from small to large volumes while maintaining consistent filling quality across different production volumes.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The direct injection system enables high-volume manufacturing of liquid metal interconnects with improved filling quality, reduced waste, and lower electrical resistance by minimizing material usage and oxidation, thus addressing the limitations of existing methods.

Implementation Method 1

a plunger to compress the liquid in the reservoir

Methodology Applied
Scientific EffectCompression: Compression

Implementation Method 2

when the head causes the plunger to compress the liquid in the reservoir, the liquid is extruded through the plurality of needles

Methodology Applied
Scientific EffectPressure gradient: Pressure Gradient

Data Source

PatentUS20230317476A1Direct injection filling device, system, and method for liquid metal interconnects
Publication Date: 2023.10.05 INTEL CORP
  • US20230317476A1 patent drawing
  • US20230317476A1 patent drawing
  • US20230317476A1 patent drawing

AI summary

In one embodiment, a direct injection device includes a head, a plunger, a reservoir, and multiple needles. The head controls extrusion of liquid stored in the reservoir of the direct injection device. For example, the head causes the plunger to compress the liquid in the reservoir, which causes the liquid to be extruded through the needles.