Liquid Metal Shielding Frame for Fine-Pitch Interconnect EMI

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Solution Overview

Problem

Signal integrity performance degradation due to electromagnetic interference (EMI) and crosstalk coupling at tightly coupled first level interconnects (FLI) between a silicon die and a package substrate, particularly at bump pitch geometries ≤110 μm, limits I/O data-rate and silicon area scaling, and existing solutions like reduced Signal:Ground ratio, ground-webbing designs, and receiver device circuitry equalization come with drawbacks such as increased silicon footprint, power consumption, and incomplete shielding.

Innovation Solution

The use of a dielectric frame with a conductive layer, including a liquid metal alloy, to provide continuous electrical shielding and improved vertical crosstalk shielding at C4 interconnects, allowing for reduced bump pitch and relaxed Signal-to-Ground ratio, while enhancing power delivery and package warpage control through increased Vcc bump contact area and volume.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If reduced Signal:Ground ratio is implemented to improve EMI shielding, then electromagnetic interference shielding is improved, but silicon footprint increases

Engineering Contradiction:
ImproveEMI shieldingVSAvoidsilicon footprint
Core Design Contradiction:
Object-affected harmful factorsVSArea of moving object

Solution Approach 1:

The patent introduces a vertical shielding dimension by placing a conductive layer within the frame structure between the silicon die and package substrate, rather than relying solely on planar Signal:Ground ratio adjustment. This third-dimensional approach provides EMI shielding without increasing the horizontal silicon footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The conductive layer acts as an intermediary shielding element between the signal bumps and ground plane, providing EMI protection through a intermediate conductive barrier that does not require changing the Signal:Ground ratio at the bump level.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If ground-webbing design is implemented to improve EMI shielding, then electromagnetic coupling is reduced, but routing density is limited at confined bump break-out area

Engineering Contradiction:
Improveelectromagnetic couplingVSAvoidrouting density
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The conductive layer provides shielding in the vertical dimension between die and substrate, eliminating the need for complex ground-webbing routing in the confined bump break-out area. This resolves the routing density limitation while maintaining EMI shielding effectiveness.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If receiver device circuitry equalization is implemented to improve signal integrity, then signal integrity performance is improved, but power consumption increases

Engineering Contradiction:
Improvesignal integrityVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent converts the harmful electromagnetic coupling into a controlled shielding arrangement using the conductive layer, improving signal integrity through passive physical shielding rather than active circuitry equalization, thereby reducing power consumption.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

4Productivity

If bump pitch is reduced to improve I/O density, then I/O density increases, but electromagnetic coupling between adjacent bumps increases

Engineering Contradiction:
ImproveI/O densityVSAvoidelectromagnetic coupling
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The conductive layer serves as an intermediary shielding barrier between closely-spaced bumps, enabling reduced bump pitch while maintaining low electromagnetic coupling through the intermediate conductive shield.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

By adding vertical shielding through the conductive layer, the patent enables tighter horizontal bump spacing without increasing electromagnetic coupling, thus achieving higher I/O density.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces silicon footprint, improves data bandwidth, and power integrity, while maintaining signal integrity and controlling package warpage, thus enabling miniaturization and higher I/O density without the drawbacks of existing solutions.

Implementation Method 1

a conductive layer, including a liquid metal alloy, to provide continuous electrical shielding and improved vertical crosstalk shielding

Methodology Applied
Scientific EffectElectromagnetic shielding: Faraday Cage

Data Source

PatentUS20240145420A1Liquid metal shield for fine pitch interconnects
Publication Date: 2024.05.02 INTEL CORP
  • US20240145420A1 patent drawing
  • US20240145420A1 patent drawing
  • US20240145420A1 patent drawing

AI summary

The present disclosure generally relates to an electronic assembly. The electronic assembly may include a substrate including a plurality of first contact pads, a plurality of second contact pads, and a plurality of third contact pads. The electronic assembly may include a first device including a first footprint coupled to the substrate at a first surface. The electronic assembly may include a frame arranged between the first device and the substrate, the frame including a dielectric material, the frame further including a main frame extending around the first device, and further including a plurality of sub-frames encircling the plurality of first contact pads and the plurality of second contact pads on the substrate, wherein the frame may further include a conductive layer extending at least partially across the main frame.