Liquid Metal Circulation Pipe Protection Against Erosion
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Solution Overview
Problem
Existing plasma raw material supply mechanisms in EUV light source apparatuses face erosion issues due to the mechanical and electrochemical interaction of liquid metals like lithium and tin, which are not adequately addressed by conventional stainless steel components.
Innovation Solution
A circulation mechanism with a protective member, such as a TiN-coated collection pipe, is introduced to prevent erosion by liquid metals, utilizing a deformable sheet or hollow tubular member to cover areas where liquid metal collides, and incorporating a temperature adjustment mechanism to manage the liquid metal's temperature.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If stainless steel components are used in the plasma raw material supply mechanism, then ease of manufacture is improved, but erosion resistance to liquid metals is insufficient
Solution Approach 1:
The patent applies a protective coating layer (such as TiN, diamond-like carbon, or amorphous carbon) on the inner surface of the collection pipe, creating a composite structure. This combines the mechanical strength of stainless steel with the erosion resistance of the coating material, resolving the contradiction between ease of manufacture and erosion resistance.
2Reliability
If the collection pipe is made from erosion-resistant material, then reliability is improved, but manufacturing complexity and cost increase
Solution Approach 1:
The protective function is segmented from the structural function. The collection pipe body remains simple stainless steel for easy manufacturing, while a separate protective coating layer provides erosion resistance. This segmentation allows each component to be optimized independently, reducing overall manufacturing complexity.
Solution Approach 2:
The protective coating acts as an intermediary layer between the liquid metal and the collection pipe wall. This intermediate layer absorbs the erosive impact, protecting the underlying stainless steel structure without requiring the entire pipe to be made from complex erosion-resistant materials.
3Productivity
If liquid metal circulates continuously, then productivity is improved, but erosion of pipe components accelerates
Solution Approach 1:
The protective coating is applied beforehand to the collection pipe inner surface, creating a pre-buffer against liquid metal erosion. This beforehand protection allows continuous circulation to proceed without the pipe wall being directly exposed to erosive forces, thereby maintaining productivity while preventing material loss.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents erosion of collection and supply pipes by liquid metals, ensuring continuous operation and maintaining the integrity of the plasma raw material supply system.
Implementation Method 1
Existing plasma raw material supply mechanisms in EUV light source apparatuses face erosion issues due to the mechanical and electrochemical interaction of liquid metals like lithium and tin
Implementation Method 2
The circulation drive section allows the liquid metal accommodated in the storage section to move to the supply pipe, and thus circulates the liquid metal to and from the target mechanism
Implementation Method 3
incorporating a temperature adjustment mechanism to manage the liquid metal's temperature
Data Source
AI summary
A circulation mechanism includes a storage section, a supply pipe, a collection pipe, a circulation drive section, and a protective member. The storage section accommodates liquid metal. The supply pipe supplies the liquid metal accommodated in the storage section to a target mechanism. The collection pipe is communicated with the storage section and collects the liquid metal that has been drained away from the target mechanism into the storage section. The circulation drive section allows the liquid metal accommodated in the storage section to move to the supply pipe, and thus circulates the liquid metal to and from the target mechanism. The protective member is disposed to cover a portion of an inner wall of the collection pipe, the portion corresponding to a position at which the liquid metal flowing through the collection pipe collides with the liquid metal accommodated in the storage section.