Modular Liquid Metal X-Ray Source for High-Brilliance Microscopy

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Solution Overview

Problem

Conventional X-ray instruments face limitations in brilliance due to anode power density constraints, require frequent maintenance for solid target sources, and are often large and immobile, making them unsuitable for high-resolution X-ray microscopy.

Innovation Solution

A modular laser-produced plasma X-ray system utilizing a liquid metal flow within a low-pressure or vacuum chamber, where high-power laser pulses are focused onto a metal target to generate X-rays, preventing debris accumulation and enabling continuous operation with reduced maintenance needs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If conventional X-ray tubes with fixed or rotating anodes are used, then X-ray flux can be generated, but the brilliance is limited by the maximum power density the anode can withstand without melting

Engineering Contradiction:
Improveanode power densityVSAvoidanode melting resistance
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The patent uses a liquid metal target instead of a solid anode, allowing the target to flow and be continuously replenished. The liquid metal circulates through a pump system, enabling high power density interaction with the electron beam while the liquid flow prevents localized melting by constantly replacing the interaction surface with fresh material.

Inventive Principle:
Principle #29Pneumatics and hydraulics

Solution Approach 2:

The patent changes the physical state of the target from solid to liquid, fundamentally altering how the target handles thermal load. The liquid metal can absorb and distribute heat more effectively, and its flow characteristics allow for dynamic adjustment of the interaction parameters, resolving the contradiction between power density and melting resistance.

Inventive Principle:
Principle #35Parameter changes

2Power

If rotating anode is used to distribute energy over larger area, then higher power electron beams can be used, but the electron beam cannot be focused to a tight spot and maximum achievable brilliance is lower

Engineering Contradiction:
Improveelectron beam powerVSAvoidbeam focus quality
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The patent employs a flowing liquid metal target that dynamically presents a continuously renewing surface to the electron beam. This dynamic system allows the beam to be focused to a tight spot on the liquid surface while the flow prevents thermal accumulation, enabling both high power and high brilliance simultaneously.

Inventive Principle:
Principle #15Dynamics

3Power

If solid target sources are used, then X-rays can be generated, but fine metal powder debris accumulates inside the vacuum chamber requiring regular cleaning

Engineering Contradiction:
ImproveX-ray generation efficiencyVSAvoidmaintenance frequency
Core Design Contradiction:
PowerVSEase of operation

Solution Approach 1:

The liquid metal target system eliminates solid target debris by using a flowing liquid that can be continuously circulated and filtered. Any vaporized or eroded material is carried away by the liquid flow rather than accumulating as powder debris, dramatically reducing maintenance requirements for vacuum chamber cleaning.

Inventive Principle:
Principle #29Pneumatics and hydraulics

4Reliability

If traditional X-ray systems are designed for high brilliance, then X-ray microscopy capability is improved, but the systems become large, immobile, and difficult to take apart for maintenance

Engineering Contradiction:
ImproveX-ray microscopy performanceVSAvoidsystem size and mobility
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent employs a modular design where the liquid metal circulation system, laser heating system, and X-ray detection components are segmented into separate functional units. This modular architecture enables the system to be configured in compact arrangements while maintaining high brilliance performance, and facilitates easier maintenance by allowing individual modules to be serviced independently.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This system achieves high-brilliance X-ray generation with narrow-bandwidth emission, minimizing maintenance and allowing for compact, modular design suitable for X-ray microscopy, as debris is prevented from accumulating on windows through laser-induced evaporation or ablation.

Implementation Method 1

laser pulses are focused onto a metal target to generate X-rays

Methodology Applied
Scientific EffectLaser-produced plasma: Plasma

Implementation Method 2

laser-induced evaporation or ablation

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 3

laser-induced evaporation or ablation

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 4

laser-induced evaporation or ablation

Methodology Applied
Scientific EffectAblation: Ablation

Implementation Method 5

laser pulses reflect off the target surface onto the X-ray window

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 6

a circulation pump within the liquid metal flow system for circulating the liquid metal

Methodology Applied
Scientific EffectFluid flow: Convection

Data Source

PatentUS11930581B2Modular laser-produced plasma x-ray system
Publication Date: 2024.03.12 RES INSTR CORP
  • US11930581B2 patent drawing
  • US11930581B2 patent drawing
  • US11930581B2 patent drawing

AI summary

A modular laser-produced plasma X-ray system includes a liquid metal flow system enclosed within a low-pressure chamber, the flow system including a liquid metal, wherein in at least one location on the liquid metal forms a metal target directly illuminated by laser pulses, a circulation pump within the liquid metal flow system for circulating the liquid metal, a laser pulse emitter configured to transmit laser pulses into the chamber via a laser window, focusing optics, located between the emitter and the metal target, the focusing optics directing the laser pulses to strike the metal target at a target location to form X-ray pulses, and an X-ray window positioned within the chamber to enable the X-ray pulses to exit the chamber.