Liquid Mixing Apparatus Flow Synchronization
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Solution Overview
Problem
Existing processing liquid mixing apparatuses cannot accurately control the flow rate proportions of stock solutions to achieve the desired mixing ratio in processing liquids, leading to inefficiencies and waste, particularly at the initial supply time when higher flow rate solutions lag behind lower flow rate solutions.
Innovation Solution
A processing liquid mixing apparatus with a flow controller, flow detector, discharge valves, and supply valves that adjust the flow rates and supply timing of stock solutions to ensure all reach predetermined rates before mixing, allowing for precise control of the mixing ratio and minimizing waste by optimizing the supply sequence based on set flow rates and time-flow rate characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the flow controller gradually increases the flow rates of stock solutions after discharge starts, then the flow rates reach predetermined values, but the stock solutions cannot reach the set flow rates at the same time, causing incorrect mixing ratios
Solution Approach 1:
The control unit calculates and sets preliminary discharge times for each flow controller before discharge begins. This preliminary action ensures that each stock solution reaches its predetermined flow rate simultaneously, resolving the timing mismatch problem without requiring gradual increase after discharge starts.
Solution Approach 2:
The control unit receives feedback from flow detectors that monitor the actual flow rates of stock solutions. Based on this feedback, the control unit adjusts the discharge timing and flow rates to ensure all stock solutions reach their set flow rates simultaneously, maintaining precise mixing ratios.
2Speed
If the stock solution with higher set flow rate is supplied first, then it reaches the set flow rate faster, but it cannot reach the set flow rate at the same time as stock solutions with lower set flow rates
Solution Approach 1:
The system applies asymmetric discharge timing to different stock solutions based on their individual flow rate characteristics. Stock solutions with higher set flow rates are discharged earlier, while those with lower set flow rates are discharged later, creating an asymmetric timeline that results in simultaneous arrival at the mixing tank.
Solution Approach 2:
The control unit dynamically changes the discharge parameters (timing and flow rate) for each stock solution based on predetermined time-flow rate characteristics. This parameter adjustment ensures that despite different initial flow rates, all stock solutions reach their set values simultaneously.
3Productivity
If discharge valves are opened to supply stock solutions to the mixing tank, then the mixing process can begin, but the mixing ratio cannot be maintained constant at initial supply time
Solution Approach 1:
Before opening the discharge valves to begin mixing, the control unit performs preliminary calculations to determine the exact discharge timing for each stock solution. This preliminary action ensures that when discharge begins, all stock solutions are delivered at precisely controlled rates from the start, maintaining constant mixing ratio throughout the entire process.
Data Source
AI summary
A processing liquid mixing apparatus and method capable of maintaining a mixing ratio of the processing liquid produced in a mixing tank constant, a substrate processing apparatus including the processing liquid mixing apparatus, and a storage medium storing a program for controlling the processing liquid mixing apparatus are disclosed. Discharge valves are first open and supply valves are close to discharge stock solutions to an outside through the discharge valves. After all flow rates of the stock solutions detected by LFC reach a predetermined flow rate, the discharge valves are close and the supply valves are open to supply the stock solutions to the second mixing tank through the supply valves.