Liquid Particle Counter for Semiconductor Cleaning Endpoint Detection
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Solution Overview
Problem
Current semiconductor substrate cleaning processes face challenges in precision and efficiency due to increasingly smaller feature sizes, leading to increased device fragility and the need for labor-intensive off-line lab analysis for endpoint detection, resulting in prolonged processing times and tool downtime.
Innovation Solution
A cleaning system comprising an outer basin, a liner, and a circulation system with a filter and liquid particle counters for inline and offline particle counting, enabling real-time monitoring and reduced operator intervention, allowing for immediate endpoint detection and minimizing contamination and downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If off-line lab analysis is used for endpoint detection, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The patent replaces manual mechanical sampling and off-line lab analysis with an automated optical measurement system. The liquid particle counter uses light scattering principles to detect and count particles in real-time, substituting the mechanical sampling process with automated optical detection that provides both precision and speed.
Solution Approach 2:
The patent introduces an intermediary automated sampling and measurement system between the cleaning process and final analysis. The liquid particle counter acts as an intermediary device that continuously monitors particle levels in the cleaning solution, eliminating the need for manual sampling and off-line analysis while maintaining measurement accuracy.
2Measurement precision
If manual sampling and lab analysis are used, then measurement precision is improved, but productivity decreases
Solution Approach 1:
The system enables self-service automated monitoring where the liquid particle counter continuously and autonomously measures particle levels in the cleaning solution without requiring operator intervention. The system automatically detects endpoint conditions and triggers appropriate responses, allowing the cleaning process to maintain high productivity while ensuring precise particle counting.
Solution Approach 2:
The patent implements continuous real-time particle counting during the cleaning process rather than intermittent manual sampling. The liquid particle counter continuously monitors particle levels, ensuring that useful measurement action occurs without interruption, thereby maintaining both precision and high productivity throughout the entire cleaning cycle.
3Loss of time
If real-time particle counting is implemented, then loss of time is reduced, but device complexity increases
Solution Approach 1:
The liquid particle counter serves multiple functions: it continuously monitors particle levels, detects endpoint conditions, triggers alarm signals, and interfaces with process control systems. By consolidating these multiple functions into a single integrated device, the system reduces overall complexity while achieving real-time particle counting and minimizing tool downtime.
Solution Approach 2:
The patent implements a feedback mechanism where the liquid particle counter continuously provides real-time particle level information back to the process control system. This feedback enables automatic endpoint detection and process adjustment, reducing the need for complex manual monitoring procedures while minimizing downtime through automated decision-making.
4Productivity
If automated real-time monitoring is used, then productivity is improved, but device complexity increases
Solution Approach 1:
The patent merges the particle counting function with the existing cleaning process control system. The liquid particle counter is integrated into the circulation system and communicates with the process controller, combining monitoring and control functions into a unified system. This integration improves productivity while avoiding the complexity of separate standalone monitoring equipment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system reduces processing time and tool downtime by enabling real-time endpoint detection and minimizing contamination, thereby lowering the cost of ownership and improving cleaning efficiency.
Implementation Method 1
a liquid particle counter in communication with the fluid
Implementation Method 2
the circulation system comprising a filter for removing particles from the fluid
Data Source
AI summary
Embodiments of the present disclosure generally relate to cleaning substrates, and more particularly, to methods and apparatus for endpoint detection of a cleaning process. The apparatus includes an outer cleaning basin, a liner, and a circulation system coupled to the liner. The circulation system includes a filter for removing particles from a fluid. A liquid particle counter is fluidly coupled to fluid in the liner for performing particle counting. Methods for using the apparatus are also described.