Liquid Photoreactive Composition for Multiphoton Polymerization

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Solution Overview

Problem

Multiphoton fabrication processes face limitations in achieving sub-micron resolution and dimensional accuracy due to residual solvent in photoreactive compositions, which causes distortion and is challenging to work with air interfaces and index matching fluids, leading to reduced throughput and resolution.

Innovation Solution

A liquid photoreactive composition comprising cationically polymerizable aliphatic epoxides, free-radically polymerizable compounds, and a two-photon photoinitiator system with an aromatic onium salt, used in multiphoton polymerization, minimizing solvent content to reduce distortion and enabling high-resolution three-dimensional feature fabrication with both air and immersion objective lenses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If solvent cast solid polymerizable composition is used, then the composition can be disposed on substrate, but residual solvent causes distortion of three-dimensional structure during development

Engineering Contradiction:
Improvedimensional accuracyVSAvoidsolvent distortion
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The patent changes the physical state parameter of the photoreactive composition from solid (solvent-cast) to liquid, eliminating residual solvent issues. The liquid composition allows complete evaporation or removal of solvent without leaving residues that cause distortion, thereby improving dimensional accuracy while maintaining ease of application.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses a solvent-free or low-solvent environment in the liquid photoreactive composition, creating an inert chemical environment that eliminates harmful solvent residues. This approach removes the source of distortion without requiring complex solvent removal processes, directly addressing the dimensional accuracy problem.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

2Ease of operation

If solvent cast solid polymerizable composition is used, then the composition can be imaged, but air interface between photoresist and optics complicates the imaging process

Engineering Contradiction:
Improveimaging process simplicityVSAvoidinterface complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent eliminates the air interface problem by using a liquid photoreactive composition that can be imaged through direct contact with optics or with minimal interface complexity. The liquid state allows for simpler optical coupling compared to solid photoresist, reducing the number of interfaces and simplifying the imaging process.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

3Ease of operation

If solvent cast solid polymerizable composition is used, then the composition can be imaged, but index matching fluid sandwiched between optics and photoresist surface is required

Engineering Contradiction:
Improveimaging process simplicityVSAvoidfluid interface complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent eliminates the need for index matching fluids by using a liquid photoreactive composition with refractive index properties that are inherently compatible with optical imaging. The liquid state and composition allow for direct imaging without requiring additional index matching layers, reducing device complexity.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

4Manufacturing precision

If conventional photoreactive composition is used, then multiphoton polymerization can occur, but resolution is limited by voxel size and shape

Engineering Contradiction:
Improvespatial resolutionVSAvoidvoxel dimension control
Core Design Contradiction:
Manufacturing precisionVSMeasurement precision

Solution Approach 1:

The patent changes the composition state from solid to liquid, which fundamentally alters the polymerization dynamics and voxel formation. The liquid photoreactive composition enables more precise control over polymerization front propagation and voxel dimensional control, improving both spatial resolution and measurement precision through modified reaction kinetics and material flow properties.

Inventive Principle:
Principle #35Parameter changes

5Productivity

If conventional photoreactive composition is used, then three-dimensional structures can be fabricated, but throughput is reduced due to processing limitations

Engineering Contradiction:
Improvefabrication throughputVSAvoidprocessing time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The patent changes the composition from solid to liquid, which accelerates the polymerization process and reduces processing time. The liquid photoreactive composition allows for faster material response to laser excitation, quicker polymerization kinetics, and eliminated solvent removal steps, directly improving fabrication throughput while reducing total processing time.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The approach results in superior three-dimensional articles with reduced dimensional distortion, higher sensitivity, and the ability to fabricate microstructures taller than the objective's working distance, while maintaining high resolution and rapid throughput.

Implementation Method 1

Multiphoton photochemical processes generally involve the simultaneous absorption of two or more photons by an absorbing chromophore

Methodology Applied
Scientific EffectMultiphoton absorption: Absorption (EM radiation)

Implementation Method 2

Multiphoton-induced photopolymerization, typically using a femtosecond pulsed laser

Methodology Applied
Scientific EffectPhotopolymerization: Photopolymerisation

Data Source

PatentUS10133174B2Liquid photoreactive composition and method of fabricating structures
Publication Date: 2018.11.20 3M INNOVATIVE PROPERTIES CO
  • US10133174B2 patent drawing
  • US10133174B2 patent drawing
  • US10133174B2 patent drawing

AI summary

A method of fabricating a structure includes disposing a liquid photoreactive composition on a substrate, exposing a portion of the liquid photoreactive composition to laser light of sufficient intensity and wavelength to cause polymerization via two-photon excitation of the two-photon sensitizer and polymerization of a portion of the liquid photoreactive composition thereby providing an exposed composition; and developing the exposed composition to provide the structure. The liquid composition includes: at least one cationically polymerizable polyepoxide; at least one compound comprising free-radically polymerizable groups; an effective amount of a two-photon photoinitiator system, wherein the weight ratio of component (a) to component (b) is from 25:75 to 75:25, inclusive. The two-photon photoinitiator system includes a two-photon sensitizer and an aromatic onium salt. The liquid photoreactive composition may contain less than about one percent by weight of organic solvent.