Processing Liquid Pipe Control for Uniform Substrate Discharge Timing
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Solution Overview
Problem
In substrate processing, the varying suction methods for processing liquid pipes result in different timing for processing liquid discharge, leading to inconsistent processing times across substrates, affecting uniformity.
Innovation Solution
A substrate processing apparatus with a controller that executes a first suctioning step to retract the processing liquid's leading end surface to a standby position and a second suctioning step to further retract it, ensuring the surface is in a common position for uniform discharge, regardless of suction method, and includes sensors for accurate positioning verification.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If different suctioning methods are used to retract the processing liquid, then the processing liquid can be discharged, but the discharge timing varies leading to inconsistent processing times
Solution Approach 1:
The patent introduces a standby position disposing step that occurs before the actual substrate processing. This preliminary action ensures the processing liquid is positioned at a predetermined standby position in the pipe, so that when discharge begins, it starts from a consistent state. This resolves the timing variation issue by preparing the system in advance with a standardized liquid position.
Solution Approach 2:
The patent changes the control parameter from variable suction timing to fixed liquid position. By controlling the suctioning process to achieve a specific standby position (rather than just any discharge), the system transforms the variable discharge timing into a controlled, repeatable state. The standby position serves as a standardized parameter that ensures consistent processing times.
2Adaptability or versatility
If the processing liquid is suctioned to different positions, then various suctioning needs are met, but the discharge timing becomes inconsistent
Solution Approach 1:
The standby position disposing step is executed as a preliminary action before substrate processing begins. This ensures that regardless of which suctioning method is used or what position the liquid reaches during suctioning, the system resets to a known standby position in advance, eliminating time variations during actual processing.
Solution Approach 2:
The patent employs sensors to detect the position of the processing liquid and provides feedback to the control unit. This feedback mechanism allows the system to monitor whether the liquid has reached the standby position and adjust the suctioning process accordingly, ensuring consistent discharge timing while maintaining adaptability in suctioning methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures uniform processing by maintaining consistent processing liquid supply timing across substrates, preventing variations due to different suction methods and ensuring efficient discharge.
Implementation Method 1
a suctioning unit for suctioning the processing liquid existing inside the processing liquid pipe
Data Source
AI summary
A substrate processing apparatus includes a suctioning unit for suctioning a processing liquid existing inside a processing liquid pipe that communicates with a discharge port, and a controller. In the suctioning step, the controller executes a suctioning step of suctioning the processing liquid existing inside the processing liquid pipe by the suctioning unit. The controller selectively executes a first suctioning step of retracting a leading end surface of the processing liquid and disposing the leading end surface of the processing liquid after suctioning in a preliminarily set standby position inside the processing liquid pipe, and a second suctioning step of retracting the leading end surface of the processing liquid further back than the standby position. After the second suctioning step, the controller further executes a standby position disposing step of supplying the processing liquid to the processing liquid pipe by the processing liquid supplying unit and disposing the leading end surface of the processing liquid in the standby position.