Liquid Supply Pipe Impurity Removal Using Ultrasonic Vibration
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Solution Overview
Problem
Existing liquid treating processes in semiconductor manufacturing generate fine impurities that cannot be filtered by conventional filters, leading to their supply onto substrates.
Innovation Solution
A liquid supplying unit equipped with an impurity removing unit that includes a measuring unit to detect impurity characteristics, a vibrating unit to apply vibration, and a capturing unit to adsorb impurities, controlled by a control unit to manage vibration frequency based on impurity data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a filter is installed in the liquid supply pipe to remove impurities, then large impurities can be filtered out, but fine impurities cannot be effectively removed
Solution Approach 1:
The patent applies ultrasonic vibration to the treatment liquid flowing through the liquid supply pipe. The vibration frequency is set to match the natural frequency of impurity particles, causing them to resonate and separate from the liquid flow. This mechanical vibration method effectively removes both large and fine impurities without requiring complex multi-stage filtration structures, thus resolving the contradiction between impurity removal effectiveness and device complexity.
2Manufacturing precision
If a filter with smaller mesh size is used to remove fine impurities, then impurity removal effectiveness improves, but liquid flow resistance increases
Solution Approach 1:
The patent replaces the traditional mechanical filtration system with an ultrasonic vibration-based impurity removal system. Instead of using physical barriers (filters) that block liquid flow, the system uses ultrasonic waves to vibrate and separate impurities from the liquid. This substitution maintains high liquid flow rates while achieving effective fine impurity removal, resolving the contradiction between manufacturing precision and liquid flow speed.
3Manufacturing precision
If multiple filters are installed in series to remove impurities of different sizes, then impurity removal effectiveness improves, but device complexity and space requirements increase
Solution Approach 1:
The patent employs a single ultrasonic vibration device that can remove impurities of all sizes simultaneously. By adjusting the vibration frequency and amplitude, the system can effectively remove large particles, fine particles, and even colloidal impurities that would otherwise require multiple different filtration stages. This multi-functional approach achieves comprehensive impurity removal while minimizing device complexity and space requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively removes impurities and bubbles from the treatment liquid before it reaches the substrate, maintaining the purity of the liquid supply.
Implementation Method 1
a vibrating unit configured to apply vibration to the treatment liquid
Implementation Method 2
a capturing unit configured to adsorb the impurity in the treatment liquid to which the vibration is applied
Data Source
AI summary
The present invention provides a liquid supplying unit, including: a nozzle; a liquid supply pipe configured to supply a treatment liquid to the nozzle; and an impurity removing unit installed in the liquid supply pipe to remove an impurity in the treatment liquid, in which the impurity removing unit includes: a measuring unit configured to measure a characteristic of the impurity in the treatment liquid and form impurity data; a vibrating unit configured to apply vibration to the treatment liquid; a capturing unit configured to adsorb the impurity in the treatment liquid to which the vibration is applied; and a control unit configured to control the measuring unit and the vibration unit, and when the impurity data exceeds a reference data range, the control unit operates the vibrating unit.