Liquid Processing Apparatus Cup Elevation Mechanism
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Solution Overview
Problem
Existing single wafer type liquid processing apparatuses face challenges in efficiently managing multiple processing liquids, as they require complex synchronization control for elevating cups to prevent cross-contamination and increased equipment costs due to independent driving mechanisms for each cup.
Innovation Solution
A liquid processing apparatus with a first and second cup, each with a driving unit, where the controller sets the ascending speed of the first cup higher than the second cup when both are ascended simultaneously, allowing them to be elevated synchronously without complex synchronization control, and using coupling parts to transfer driving force, enabling efficient operation with reduced equipment costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If independent driving mechanisms are provided for each cup to enable separate elevation and differential discharge of multiple processing liquids, then the adaptability and versatility of the apparatus is improved, but the device complexity and equipment cost increase
Solution Approach 1:
The patent combines multiple driving mechanisms into a single driving unit that controls the elevation of multiple cups through a common drive shaft. This merging approach maintains the ability to differentially discharge multiple processing liquids while reducing device complexity by eliminating the need for independent driving mechanisms for each cup.
Solution Approach 2:
The single driving unit is designed to perform multiple functions: it can elevate different cups at different times, control the elevation speed of each cup, and enable differential discharge of multiple processing liquids. This multi-functional design replaces the need for multiple independent driving mechanisms.
2Ease of operation
If independent driving mechanisms are provided for each cup to enable separate elevation, then the ease of operation is improved, but the device complexity and equipment cost increase
Solution Approach 1:
The patent merges multiple independent driving mechanisms into a single driving unit with a common drive shaft that can control the elevation of multiple cups. This maintains operational flexibility while reducing device complexity.
3Reliability
If complex synchronization control is implemented to prevent cross-contamination of processing liquids, then the reliability is improved, but the device complexity increases
Solution Approach 1:
The patent introduces a timing control mechanism that acts as an intermediary between the driving unit and the cup elevation process. This timing control ensures that cups are elevated in a predetermined sequence, preventing cross-contamination of processing liquids while maintaining simple hardware architecture.
4Productivity
If multiple independent driving mechanisms are used to elevate cups, then the productivity is improved through simultaneous elevation, but the device complexity and equipment cost increase
Solution Approach 1:
The patent combines multiple driving mechanisms into a single driving unit that can elevate multiple cups simultaneously or in sequence through a common drive shaft. This maintains productivity while reducing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and cost-effective simultaneous elevation of two cups during liquid processing, reducing the need for complex synchronization control and minimizing equipment costs by leveraging the driving force transfer through coupling parts, effectively managing multiple processing liquids.
Implementation Method 1
The processing liquid supplied to the rotating wafer is flung away from the wafer by the centrifugal force to such an extent that the processing liquid becomes droplets or mists and are scattered around the spin chuck
Implementation Method 2
The first cup or the first elevating member is overlapped with the second cup or the second elevating member from the lower side to transfer the driving force of the first driving unit to the second cup or the second elevating member
Data Source
AI summary
Disclosed is a liquid processing apparatus including first and second cups installed so as to surround a rotation holding unit of a substrate and guide a processing liquid scattered from the rotating substrate downwards. A first driving unit and a second driving unit elevate the first cup and the second cup between a position receiving the processing liquid and the lower position thereof. A controller controls that the first cup and the second cup are ascended at the same time by transferring the driving force of the first driving unit while the first cup or a first elevating member thereof is overlapped with the second cup or a second elevating member thereof from the lower side by setting the ascending speed of the first cup to be higher than the ascending speed of the second cup when the first and second cups are ascended at the same time.