Liquid Processing Apparatus Filtration Throughput Control
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Solution Overview
Problem
Existing liquid processing apparatuses face a decrease in throughput when chemical liquids are circulated and filtered multiple times, leading to inefficiencies in filtration efficiency.
Innovation Solution
A liquid processing apparatus with a single filter that controls the discharge and return of process liquid, using a pump and on-off valves to synthesize and filter the liquid multiple times, achieving filtration efficiency comparable to multiple filters without significant apparatus modification.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If chemical liquid is circulated and filtered multiple times to improve filtration efficiency, then filtration efficiency is improved, but throughput decreases
Solution Approach 1:
The liquid processing system is divided into multiple independent processing paths, each with its own filter. The control unit selectively activates specific paths based on the number of filtrations required, allowing parallel processing of different liquid portions. This segmentation enables multiple filtrations for some liquid while maintaining throughput by processing other liquid portions simultaneously through alternative paths.
Solution Approach 2:
The control unit dynamically adjusts the filtration process by determining the optimal number of filtrations for each liquid processing operation. It selectively controls which processing paths are activated based on real-time requirements, transitioning between single-filtration and multi-filtration modes. This dynamic adjustment optimizes the balance between filtration efficiency and throughput.
2Reliability
If multiple filters are provided to improve filtration efficiency, then filtration efficiency is improved, but device complexity increases
Solution Approach 1:
Each processing path uses identical filter components and liquid processing units, creating modular, interchangeable modules. The control unit selectively activates different combinations of these identical modules based on filtration requirements. This universality allows the system to achieve multi-filtration efficiency without requiring fundamentally different or complex apparatus modifications, as the same standardized components are reused across multiple paths.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus maintains high filtration efficiency while preventing throughput decrease, achieving similar results to multiple filters with a single filter, thus enhancing process efficiency without extensive modifications.
Implementation Method 1
a pump disposed in the supply conduit on a secondary side of the filter
Implementation Method 2
a filter disposed in the supply conduit and configured to filtrate the process liquid
Data Source
AI summary
A filtration efficiency, which is similar to the filtration efficiency obtained when a plurality of filters are provided, can be obtained by one filter, and decrease in throughput can be prevented. Based on a control signal from a control unit 101, a resist liquid L is sucked into a pump 70 through a filter. A part of the resist liquid sucked in the pump is discharged from a discharge nozzle 7. The remaining resist liquid is returned to a supply conduit 51b on a primary side of the filter. A process is synthesized by adding a replenishment amount equal to the discharge amount to the return amount. The discharge of the synthesized process liquid and the filtration thereof by the filter are performed the number of times corresponding to a rate between the discharge amount and the return amount.