Liquid Processing Apparatus Temperature Regulation via Valve Circulation

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Solution Overview

Problem

Conventional liquid processing apparatuses face instability in temperature regulation, leading to variations in the temperature of the liquid supplied to processing units, which can result in non-uniform processing and increased risk of dew condensation and watermark formation on objects being processed.

Innovation Solution

A liquid processing apparatus with a supply line and return line configuration that allows for the circulation of temperature-regulated liquid, including a liquid-supply switching valve to manage the flow between the supply line and return line, ensuring consistent temperature regulation and preventing heat loss during pauses in liquid supply.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If the liquid supply is stopped during processing pauses, then energy consumption is reduced, but the temperature of the supply line and valve decreases causing temperature instability upon restart

Engineering Contradiction:
Improveenergy consumptionVSAvoidtemperature stability
Core Design Contradiction:
Loss of energyVSStability of the object's composition

Solution Approach 1:

The valve is pre-heated by circulating heated liquid through it during periods when the processing unit is not actively receiving liquid. This preliminary heating action ensures that when liquid supply restarts, the valve does not cause significant heat loss, thereby maintaining temperature stability without continuous energy consumption during active processing

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system maintains continuous circulation of heated liquid through the supply line and valve even during processing pauses, ensuring the thermal field remains stable. This continuous thermal action prevents temperature drops in the supply line and valve, eliminating temperature instability upon restart while minimizing energy consumption through efficient heat retention

Inventive Principle:
Principle #20Continuity of useful action

2Quantity of substance

If the valve heat capacity is large, then the valve can store more heat, but the temperature of the supplied liquid varies significantly when supply is stopped and restarted

Engineering Contradiction:
Improveheat capacityVSAvoidliquid temperature variation
Core Design Contradiction:
Quantity of substanceVSTemperature

Solution Approach 1:

The valve is pre-heated by circulating heated liquid through it during idle periods. This preliminary heating utilizes the valve's large heat capacity advantageously by filling it with thermal energy before processing restart, ensuring that the stored heat is released during active processing rather than causing temperature drops upon restart

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

A temperature control mechanism acts as an intermediary between the heated liquid source and the processing unit. It regulates the liquid flow through the valve, ensuring that the valve's heat capacity is optimally utilized to maintain stable liquid temperature during supply interruptions and restarts, rather than allowing significant temperature variations

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration stabilizes the temperature of the liquid supplied to processing units, reducing the risk of non-uniform processing and dew condensation, thereby enhancing the reliability and consistency of the processing operations.

Implementation Method 1

a liquid supply mechanism 15 configured to supply a liquid 300; a supply line 30 connected to the liquid supply mechanism 15

Methodology Applied
Scientific EffectCirculation: Convection

Implementation Method 2

when a heated drying liquid is used in a drying process of an object to be processed, an endothermic amount from the object to be processed is decreased upon evaporation of the drying liquid

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 3

an endothermic amount from the object to be processed is decreased upon evaporation of the drying liquid

Methodology Applied
Scientific EffectEndothermic reaction: Endothermic Reaction

Data Source

PatentUS8950414B2Liquid processing apparatus, liquid processing method, and storage medium
Publication Date: 2015.02.10 TOKYO ELECTRON LTD
  • US8950414B2 patent drawing
  • US8950414B2 patent drawing
  • US8950414B2 patent drawing

AI summary

The liquid processing apparatus includes: a liquid supply mechanism; a supply line connected to the liquid supply mechanism, the supply line having a discharge opening for discharging a temperature-regulated liquid; a processing unit supporting the discharge opening of the supply line; a return line configured to return the liquid supplied to the supply line to the liquid supply mechanism; and a liquid-supply switching valve configured to switch between supply of the liquid, which is used in a processing of an object to be processed in the processing unit, and stoppage of the liquid supply. The liquid-supply switching valve is disposed on the supply line on a route of the liquid returning from the supply line to the liquid supply mechanism through the return line.