Liquid Ring Pump and Venturi Scrubber Abatement System
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Solution Overview
Problem
Existing abatement systems face challenges in efficiently treating effluent gases from processing chambers, particularly in collecting sub-micron particulates and handling corrosive or hazardous constituents, as they require high pressure drops and additional equipment for liquid injection, and may not be suitable for continuous operation with explosive gas mixtures.
Innovation Solution
The system combines a liquid ring pump for pre-scrubbing and a venturi scrubber with a conical inlet, where the gas and liquid mixture is tangentially conveyed to enhance particulate capture, eliminating the need for additional liquid injection equipment and allowing for continuous operation, and includes a combustion section for safely handling flammable gases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a venturi scrubber is used to collect sub-micron particles, then particle collection efficiency is improved, but pressure drop increases significantly requiring additional blowers
Solution Approach 1:
The patent combines the liquid ring pump and venturi scrubber into an integrated system where the pump's compression function provides the necessary pressure drop for the venturi scrubber to operate effectively at standard atmospheric pressure, eliminating the need for separate blower equipment
Solution Approach 2:
The liquid ring pump serves multiple functions: it acts as both a vacuum pump for the processing chamber and a compression device that provides the pressure drop needed for the venturi scrubber, reducing overall system complexity
2Duration of action of stationary object
If a venturi scrubber is used for continuous operation, then operational continuity is improved, but additional liquid injection equipment is required
Solution Approach 1:
The liquid injection function is merged into the liquid ring pump's existing liquid circulation system, eliminating the need for separate liquid injection equipment while maintaining continuous operational capability
Solution Approach 2:
The liquid ring pump's liquid circulation system performs multiple roles including sealing, cooling, and liquid injection for the venturi scrubber, reducing the number of dedicated components needed
3Stress or pressure
If liquid ring pump exhausts gas and liquid at higher pressure, then driving force through venturi scrubber is improved, but power consumption increases
Solution Approach 1:
The system optimizes the pressure ratio across the liquid ring pump to achieve the minimum necessary pressure increase that provides sufficient driving force through the venturi scrubber while minimizing energy consumption
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration achieves efficient scrubbing of both particulates and corrosive gases, reduces the risk of re-entrainment and contamination, and optimizes pressure drop for effective particulate capture, while minimizing waste and power consumption by using recirculated liquid and optimizing gas-liquid ratios.
Implementation Method 1
a liquid inlet for receiving liquid for generating a liquid ring in a stator of the pump when a rotor rotates in the stator
Implementation Method 2
a nozzle through which the gas and liquid is conveyed for providing mixing of the gas with the liquid
Implementation Method 3
the inlet of the venturi scrubber is arranged to convey the gas and liquid mixture tangentially to the conical inlet portion such that the liquid portion of the mixture is forced to spin around the inside wall of the venturi scrubber portion
Data Source
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AI summary
Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.