Liquid Spacer Alignment for Optical Wafer Manufacturing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional spacers in optical and optoelectronic assemblies suffer from reduced accuracy in substrate-to-substrate distance due to alignment tolerances and bond line tolerances, which negatively impacts the performance and dimensions of replicated structures.
Innovation Solution
The use of liquid spacers with high viscosity, which are deposited between optical elements on substrates and then aligned and hardened to form a meniscus, providing precise control over the separation distance between substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional spacers are used in optical assemblies, then manufacturing is simpler, but substrate-to-substrate distance accuracy deteriorates due to alignment tolerances and bond line tolerances
Solution Approach 1:
The patent introduces liquid spacers as an intermediary material between substrates and optical elements. These liquid spacers are deposited in a controlled manner and cured to form precise spacers that mediate the distance between substrates, eliminating the need for mechanical alignment of solid spacers and thereby improving distance accuracy while reducing alignment tolerance requirements.
Solution Approach 2:
The patent changes the physical state of the spacer material from solid to liquid, and then to cured solid. By depositing spacers in liquid form, the system gains freedom from mechanical alignment constraints, and the liquid can be precisely controlled in volume and placement. After curing, the liquid transforms into a stable solid spacer that maintains precise dimensions, thereby improving manufacturing precision.
2Manufacturing precision
If liquid spacers are used to improve alignment accuracy, then substrate alignment precision improves, but the manufacturing process becomes more complex
Solution Approach 1:
The patent replaces mechanical alignment systems with a liquid deposition and curing system. Instead of mechanically positioning and securing solid spacers requiring precise alignment, the system uses liquid spacers that can be deposited with less stringent alignment requirements and then cured in place, simplifying the manufacturing process while maintaining high alignment accuracy.
Solution Approach 2:
The patent utilizes phase transition of the spacer material from liquid to solid through curing. The liquid phase allows for easier deposition and adaptation to substrate variations, while the solid phase provides structural stability. This phase transition enables the manufacturing process to achieve high precision without the complexity of mechanical alignment procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the accuracy of substrate alignment, reduces the need for additional clearance, and improves the precision and performance of replicated optical structures, while also being cost-efficient and adaptable for various spacer dimensions.
Implementation Method 1
bringing the two wafers together such that the liquid droplets on the first side of the first wafer adhere to the first side of the second wafer
Implementation Method 2
The liquid droplets are formed of a high viscosity material that can be hardened. The method includes hardening the liquid droplets. Hardening the liquid droplets comprises curing the liquid droplets with UV radiation.
Data Source
AI summary
A method of manufacturing a plurality of optical elements (140), the method comprising providing a first wafer (120) having hardened replication material forming optical elements (140) on a first side of the first wafer (120), providing a second wafer (121) having hardened replication material forming optical elements (140) on a first side of the second wafer (121), depositing liquid droplets (180) on the first side of the first wafer (120) between the optical elements (140) aligning the first side of the first wafer (120) with the first side of the second wafer (121), and bringing the two wafers (120, 121) together such that the liquid droplets (180) on the first side of the first wafer (120) adhere to the first side of the second wafer (121).


