Liquid Supply Device Bypass Filter During Heating
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Solution Overview
Problem
In liquid processing apparatuses, the restart of processing liquid circulation after maintenance can lead to contamination due to particles released from filters as the temperature of the processing liquid increases.
Innovation Solution
The implementation of a liquid supply device with a circulation line that includes a main line and two branch lines, each equipped with heating mechanisms, filters, and drain lines, allows for the circulation of processing liquid without passing through filters during temperature adjustments, thereby reducing contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the processing liquid is heated in the circulation line after maintenance, then the temperature is adjusted to the required level, but particles trapped in the filter are released causing contamination
Solution Approach 1:
The circulation line is divided into a first circulation line that passes through the filter and a second circulation line that bypasses the filter. This segmentation allows selective circulation paths: the second line is used for heating without filtration to avoid particle release, while the first line is used for normal filtered circulation, thus resolving the contradiction between temperature adjustment and contamination prevention
Solution Approach 2:
The system performs preliminary heating of the processing liquid through the second circulation line (bypassing the filter) before switching to the first circulation line that passes through the filter. This preliminary action allows temperature adjustment to occur before filtration, preventing the thermal release of trapped particles into the main circulation path and thereby preventing contamination
2Reliability
If the circulation line includes a filter to remove foreign substances, then the processing liquid is purified, but particles are trapped in the filter and released when temperature increases
Solution Approach 1:
The circulation system is segmented into two separate paths: one through the filter for purification and one bypassing the filter for temperature adjustment. This segmentation prevents the harmful interaction between filtration and thermal expansion that causes particle release, while maintaining both purification and temperature control functions
Solution Approach 2:
The second circulation line acts as an intermediary path that allows temperature adjustment to occur without passing through the filter. This intermediary route prevents direct thermal interaction with trapped particles, eliminating the mechanism of particle release while still enabling necessary temperature changes in the processing liquid
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces contamination of the processing liquid by preventing particles trapped in filters from being released during temperature changes, ensuring a cleaner circulation line and minimizing the risk of substrate contamination.
Implementation Method 1
The first branch line includes a first heating mechanism, a first filter, and a first drain line configured to drain the processing liquid flowing through the first branch line
Data Source
AI summary
A liquid supply device includes a tank storing a processing liquid, a circulation line, a pump, and a supply line for supplying the processing liquid to a liquid processor. The circulation line includes a main line, and first and second branch lines branching from the main line. The supply line includes first and second supply lines connected to the first and second branch lines, respectively. The first and second branch lines includes first and second heating mechanisms, first and second filters, first and second drain lines for draining the processing liquid, first and second branch circulation lines for returning the processing liquid to the tank, and first and second valves provided to switch a destination of the processing liquid, respectively.