Processing Liquid Supply Inspection for Densitometer Self-Checking
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Solution Overview
Problem
Single-wafer type processing devices face challenges in maintaining consistent concentration and temperature of processing liquids, leading to non-uniform processing performance and increased product defects due to the lack of effective inspection methods for densitometers.
Innovation Solution
A processing liquid supply device equipped with a densitometer inspection system that measures and adjusts the concentration and temperature of processing liquids using a thermometer, heating unit, and a control unit to ensure the liquids reach target values, and includes a self-checking function to verify the densitometer's functionality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a densitometer is used to measure processing liquid concentration, then concentration measurement capability is improved, but device complexity increases due to lack of self-checking function
Solution Approach 1:
The densitometer inspection system enables self-checking by automatically heating the processing liquid to its boiling point and measuring the temperature at which the predetermined concentration is reached. The system compares this measured boiling point against a predetermined temperature value to determine whether the densitometer is functioning properly, allowing the device to self-diagnose without external intervention.
Solution Approach 2:
The inspection method utilizes changes in physical parameters - specifically heating the processing liquid from ambient temperature to its boiling point - to create a measurable state change. By monitoring the temperature at which the liquid reaches its boiling point (a fundamental physical parameter), the system can verify densitometer functionality through observable parameter transformation.
2Manufacturing precision
If processing liquid temperature and concentration are not continuously monitored, then device complexity is reduced, but manufacturing precision deteriorates due to non-uniform processing
Solution Approach 1:
The system continuously monitors processing liquid temperature via a thermometer and concentration via the densitometer, feeding this information back to the control unit. The control unit compares measured values against predetermined ranges and automatically adjusts heating or triggers alerts when parameters deviate, creating a closed-loop feedback system that maintains processing uniformity.
Solution Approach 2:
The patent replaces manual inspection methods with automated electronic sensing and control systems. Temperature is measured electronically by a thermometer rather than manual methods, and concentration is monitored by the densitometer with automatic control, substituting mechanical/manual operations with electronic automation to maintain precision.
3Reliability
If the densitometer inspection function is added, then reliability is improved through defect detection, but ease of operation worsens due to additional inspection procedures
Solution Approach 1:
The densitometer inspection system performs self-diagnosis automatically without requiring operator intervention. The control unit autonomously controls the heating unit to heat the processing liquid, reads the temperature from the thermometer, compares it with the predetermined boiling point temperature, and determines whether the densitometer is functioning properly, eliminating the need for manual inspection procedures.
Solution Approach 2:
The system performs preliminary inspection of the densitometer functionality before actual substrate processing begins. By checking whether the densitometer can accurately measure concentration at the boiling point temperature in advance, the system prevents processing defects caused by instrument failure, ensuring reliability before production starts.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures consistent processing performance by maintaining the concentration and temperature of processing liquids within a predetermined range, reducing product defects and enhancing productivity in single-wafer type processing devices.
Implementation Method 1
a heating control unit that controls the heating unit to heat the processing liquid to a target temperature within a predetermined range based on the predetermined temperature
Implementation Method 2
a thermometer that measures a temperature of the processing liquid
Implementation Method 3
a densitometer that measures a concentration of the processing liquid
Implementation Method 4
a temperature setting unit that sets a boiling point temperature at which a predetermined concentration is reached as a predetermined temperature
Data Source
AI summary
According to one embodiment, a processing liquid supply device includes: a tank that stores the processing liquid; a supply path that supplies the processing liquid to the processing device; a heater that heats the processing liquid; a thermometer that measures a temperature of the processing liquid; a densitometer that measures a concentration of the processing liquid; and a controller including an inspecting unit that inspects the densitometer. The inspecting unit includes: a temperature setting device that sets a boiling point temperature at which a predetermined concentration is reached as a predetermined temperature; a heating controller that heats the processing liquid by the heater so as to reach a target temperature within a predetermined range; and a determination device that determines whether or not the concentration of the processing liquid is a target concentration within a predetermined range based on the predetermined concentration.