Liquid Supply Device Foam Separator Design
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Solution Overview
Problem
In substrate processing apparatuses, the mixture of first and second processing liquids can foam due to chemical reactions or heat, leading to suboptimal processing performance as foams are supplied to the substrate, causing liquid scattering and inaccurate flow meter readings.
Innovation Solution
A liquid supply device with a circulation path and branching parts designed to prevent foams from entering the supply line, utilizing a filter, defoamer, and gas discharger to remove foams from the processing liquid before it reaches the substrate, ensuring a foam-free supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the used liquid mixture is returned to the tank for reuse, then the processing liquid can be circulated and reused, but foams are generated due to chemical reactions or heat, leading to liquid scattering and inaccurate flow meter readings
Solution Approach 1:
The patent extracts the harmful foam from the circulation system by installing a foam separator at the tank outlet. The foam separator physically separates foam from the liquid mixture before the liquid enters the circulation path, allowing the liquid to be reused while removing the foaming components that cause scattering and measurement errors
Solution Approach 2:
The foam separator acts as an intermediary device between the storage tank and the circulation path. It mediates the conflict between liquid reuse and foam generation by intercepting and removing foam, allowing the beneficial liquid reuse to continue while preventing the harmful effects of foam
2Reliability
If the processing liquid is circulated through the substrate processing apparatus, then the liquid can be reused, but foams cause liquid scattering that affects substrate processing performance
Solution Approach 1:
The foam separator is positioned at the tank outlet, performing preliminary foam removal before the liquid enters the circulation path and substrate processing apparatus. This preliminary action prevents foam from reaching the substrate processing stage, thereby preventing liquid scattering and maintaining processing reliability
3Productivity
If the processing liquid is circulated for reuse, then resource efficiency is improved, but flow meter readings become inaccurate due to foam interference
Solution Approach 1:
The foam separator extracts foam from the liquid mixture at the tank outlet, removing the source of measurement interference before the liquid reaches the flow meter. This allows accurate flow measurement while maintaining liquid circulation efficiency
Solution Approach 2:
The foam separator serves as an intermediary that protects the flow meter from foam interference. It positioned between the tank and the circulation path to ensure that only foam-free liquid reaches the flow meter, maintaining measurement accuracy while enabling continuous circulation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents foams from being included in the processing liquid, improving substrate processing performance by reducing liquid scattering and ensuring accurate flow meter readings, thus enhancing the reliability and efficiency of the substrate processing.
Implementation Method 1
The opening is formed in the branching part and formed below a periphery of the first pipeline when the first pipeline is viewed in section... preventing foams from being included in a processing liquid supplied to a substrate processing apparatus
Data Source
AI summary
A liquid supply device includes: a storage tank configured to store a processing liquid including a first processing liquid (sulfuric acid) and a second processing liquid (hydrogen peroxide solution); a circulation path having a first pipeline through which the processing liquid passes in a horizontal direction, and configured to circulate the processing liquid stored in the storage tank; a branch path configured to supply the processing liquid to a processing unit; and a branching part having an opening for allowing the processing liquid to flow out from the first pipeline to the branch path, wherein the opening is formed in the branching part and formed below a periphery of the first pipeline when the first pipeline is viewed in section.