Liquid Supply Device Flow Rate Control with Differential Pressure Monitoring

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Solution Overview

Problem

Conventional cleaning chemical supplying devices face challenges in maintaining desired flow rates due to varying differential pressures between the IN-side and OUT-side pressures of the CLC, making it difficult to determine whether the CLC is malfunctioning or if the differential pressure is insufficient, especially when changing process recipes.

Innovation Solution

A liquid supplying device equipped with a flow rate control device that measures and controls flow rates, along with IN-side and OUT-side pressure gauges to monitor differential pressures, allowing operators to distinguish between CLC malfunctions and insufficient pressures, facilitating the selection of appropriate CLCs during process changes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a CLC with a predetermined controllable flow rate range is selected, then the device can control flow rates within that range when differential pressure is sufficient, but when differential pressure is insufficient, the actual supplied flow rate falls below the controllable range, making it impossible to determine whether the CLC is malfunctioning or the pressure is insufficient

Engineering Contradiction:
Improveflow rate control reliabilityVSAvoiddifficulty in determining CLC malfunction vs. insufficient pressure
Core Design Contradiction:
ReliabilityVSDifficulty of detecting and measuring

Solution Approach 1:

The patent applies feedback by measuring the actual differential pressure across the CLC and comparing it with the required differential pressure for the selected CLC's controllable flow rate range. The control device receives feedback from pressure sensors and adjusts its diagnosis and control actions based on this information, enabling accurate determination of whether flow rate deviations are due to CLC malfunction or insufficient differential pressure.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent replaces mechanical trial-and-error diagnosis with an automated diagnostic system that uses pressure sensors and a control device to electronically determine the cause of flow rate deviations. The control device automatically compares measured differential pressure with required values and identifies whether the issue is CLC malfunction or insufficient pressure, eliminating the need for manual mechanical inspection.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If the CLC is changed in association with a change in the process recipe, then the device can adapt to different flow rate requirements, but selecting the appropriate CLC becomes complex when differential pressure conditions vary

Engineering Contradiction:
Improveadaptability to different process recipesVSAvoidcomplexity in selecting appropriate CLC
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The system uses feedback from pressure sensors to automatically determine the actual differential pressure conditions and recommends or selects the appropriate CLC that matches both the process recipe requirements and the current pressure conditions, simplifying the selection process while maintaining adaptability.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent changes the parameter used for CLC selection from solely flow rate range to a combination of flow rate range and differential pressure conditions. By considering both parameters, the system can accurately match CLCs to process recipes under varying pressure conditions, reducing selection complexity while maintaining versatility.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If the controllable flow rate range of the CLC is used as the maximum flow rate range, then the device can supply flow rates up to that range when differential pressure is sufficient, but when differential pressure is insufficient, only a flow rate less than the maximum can be supplied

Engineering Contradiction:
Improveflow rate supply capabilityVSAvoidflow rate supply reliability under varying pressure
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The system continuously monitors differential pressure and provides feedback to the control device, which then determines the actually achievable flow rate based on the measured pressure and the selected CLC's characteristics. This feedback mechanism ensures reliable flow rate supply by adjusting expectations and control actions based on actual pressure conditions.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent makes the system dynamic by allowing the controllable flow rate range to be adjusted based on actual differential pressure conditions. When pressure is insufficient, the system dynamically reduces the target flow rate range to match what the CLC can actually deliver, ensuring reliable operation while maintaining productivity within achievable limits.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate determination of whether the CLC is malfunctioning or if the differential pressure is insufficient, allowing for the selection of suitable CLCs to maintain desired flow rates, thereby ensuring reliable chemical supply to cleaning devices.

Implementation Method 1

a differential pressure type flowmeter (orifice flowmeter) is generally used. With an orifice placed in a path through which a fluid passes, the differential pressure type flowmeter measures a volume flow rate (flow speed) of the fluid based on the differential pressure.

Methodology Applied
Scientific EffectDifferential pressure measurement: Pressure Drop

Data Source

PatentUS10926301B2Liquid supplying device and liquid supplying method
Publication Date: 2021.02.23 EBARA CORP
  • US10926301B2 patent drawing
  • US10926301B2 patent drawing
  • US10926301B2 patent drawing

AI summary

The present invention provides a liquid supplying device that can determine whether a CLC can be used appropriately. A liquid supplying device for supplying a liquid from a liquid source to a cleaning device is provided. The liquid supplying device includes a flow rate control device that measures a flow rate of a liquid from the liquid source and controls the flow rate based on the measured value, an IN-side pressure gauge provided between the liquid source and the flow rate control device and an OUT-side pressure gauge provided between the flow rate control device and the cleaning device.