Treating Liquid Supply Control for Stable Inline Heating
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Solution Overview
Problem
The inline heating technology for treating liquids in semiconductor manufacturing processes faces challenges in maintaining the temperature of the treating liquid consistently when replenished, leading to inefficient substrate treatment.
Innovation Solution
A substrate treating apparatus with a liquid supply unit that includes a tank, a circulation line, a supplementary line with a valve, and a heater, where the controller manages the valve to perform a supplementary operation by adjusting the supply amount of the treating liquid at different periods to maintain temperature stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the treating liquid is replenished in the inline heating technology, then the treating liquid can be continuously supplied to the substrate, but the temperature of the treating liquid changes rapidly and cannot be maintained at the set temperature
Solution Approach 1:
The patent segments the replenishment process into multiple stages with different flow rates. The controller divides the replenishment into a first period with a first flow rate and a second period with a second flow rate, allowing gradual mixing of new liquid with heated liquid to minimize temperature shock and maintain stable temperature during continuous supply.
2Temperature
If the treating liquid is heated in the pipe through inline heating, then the treating liquid temperature can be maintained within a certain range, but rapid temperature change occurs when replenishing liquid
Solution Approach 1:
The patent applies preliminary action by pre-heating the treating liquid in a separate heater before it enters the circulation pipe. This ensures that the replenished liquid is already at the desired temperature, preventing temperature drops during replenishment and maintaining stable temperature throughout the system without relying solely on inline heating.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively minimizes rapid temperature changes of the treating liquid during replenishment, ensuring that the substrate is treated at a set temperature, thereby enhancing treatment efficiency.
Implementation Method 1
a heater installed at the circulation line, and for heating the treating liquid
Data Source
AI summary
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a support unit configured to support a substrate; and a liquid supply unit configured to supply a treating liquid onto the substrate supported on the support unit, and wherein the liquid supply unit comprises: a tank configured to have an accommodation space for storing the treating liquid therein; a circulation line configured to circulate the treating liquid stored in the accommodation space; a supplementary line configured to supply the treating liquid to the accommodation space, and at which a valve is installed; a heater installed at the circulation line, and for heating the treating liquid; and a controller is configured to control the valve and the heater.