Liquid Supply Unit Emergency Cooling and Drain Mechanism
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Solution Overview
Problem
In semiconductor processing, high-temperature liquids like aqueous phosphoric acid solutions can overheat in circulation lines during emergency situations, damaging components and causing leaks when the pump and heater are stopped.
Innovation Solution
A substrate treating apparatus with a liquid supply unit that includes a cooling gas supply line to cool the heater unit and a drain line to discharge excess liquid, preventing overheating by controlling valves to open the drain and supply cooling gas in emergency modes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the heater unit maintains high temperature for substrate treatment, then the treatment liquid reaches required temperature, but residual heat causes overheating when pump stops during emergency
Solution Approach 1:
The patent extracts the harmful hot liquid from the circulation line by introducing a drain line that can discharge the liquid when emergency occurs. This separates the treatment function (heating) from the hazard (overheating damage) by providing a dedicated extraction path for the problematic hot liquid.
Solution Approach 2:
The patent introduces cooling gas as an intermediary substance to absorb residual heat from the heater unit and treatment liquid. The cooling gas flows through the circulation line via a cooling gas supply line, acting as a heat transfer medium that protects components from overheating while allowing the heater to maintain treatment temperature.
2Productivity
If the circulation line retains liquid for continuous treatment, then treatment efficiency is maintained, but components are damaged by residual heat when pump stops
Solution Approach 1:
The patent makes the liquid retention dynamic by introducing controllable valves (drain valve and cooling gas supply valve) that can switch between retaining liquid for continuous treatment and discharging liquid for emergency protection. This dynamic control allows the system to adapt between productivity mode and safety mode.
Solution Approach 2:
The patent performs preliminary protective action by providing advance pathways (drain line and cooling gas supply line) and control mechanisms that can be activated before damage occurs. When emergency is detected, the system can immediately discharge hot liquid or introduce cooling gas, preventing component damage before it happens.
3Object-affected harmful factors
If cooling gas is supplied to circulation line, then residual heat is removed, but system complexity increases with additional valves and lines
Solution Approach 1:
The cooling gas supply line and associated valves are designed to serve multiple functions: cooling the circulation line during emergency, potentially purging gases, and possibly assisting in liquid discharge. This multi-functionality justifies the added complexity by providing versatile protection and control capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents high-temperature overheating of liquids and protects components from damage by effectively managing the flow of liquids and cooling gases during emergencies, ensuring safe operation.
Implementation Method 1
a cooling gas supply line which supplies cooling gas to the heater unit
Implementation Method 2
a heater unit installed in the circulation line to heat the treatment liquid
Implementation Method 3
a pump unit installed in the circulation line
Data Source
AI summary
Disclosed is a method of treating a substrate, the method including: adjusting a temperature of a treatment liquid by heating the treatment liquid with a heater unit installed in the circulation line while circulating the treatment liquid in a housing of a tank through a circulation line coupled to the housing; treating a substrate by supplying a temperature-controlled treatment liquid to the substrate in a normal mode; and discharging a treatment liquid in the circulation line to the outside of the circulation line through a drain line connected to the circulation line in an emergency mode.