Liquid Storage Tank Flow-Guiding Layout for Uniform Chemical Circulation
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Solution Overview
Problem
Existing liquid storage systems in substrate treating apparatuses suffer from air bubble formation and non-uniform mixing of chemicals due to circulation through circulation lines, leading to stagnation and temperature distribution issues.
Innovation Solution
The design incorporates a liquid storage unit with a tank housing featuring a liquid outlet and inlet pipe arrangement, including a guide surface that guides the chemical flow away from the outlet, positioned lower than the inlet, and a pump to generate a flow from the outlet to the inlet, ensuring uniform mixing and stable temperature distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If chemical circulates through the circulation line, then temperature control is achieved, but air bubble generation occurs and mixing becomes uneven
Solution Approach 1:
The tank interior is segmented into multiple circulation paths by introducing guide surfaces (first guide surface and second guide surface) that divide the flow into separate channels, preventing the formation of invisible fluid channels and ensuring uniform mixing while maintaining temperature control
Solution Approach 2:
Guide surfaces are introduced as intermediary structures between the inlet and outlet to mediate the liquid flow, guiding it along predetermined paths and preventing direct short-circuit flow that causes air bubble generation and uneven mixing
2Temperature
If chemical circulates through the circulation line, then temperature control is achieved, but air bubble generation occurs
Solution Approach 1:
Guide surfaces act as intermediary structures that prevent air bubbles from forming by controlling the flow path, ensuring liquid flows along the guide surfaces rather than creating turbulent mixing that generates air bubbles
Solution Approach 2:
The guide surfaces are designed with curved configurations that smoothly guide the liquid flow, preventing abrupt changes in flow direction that would generate air bubbles and turbulence
3Temperature
If chemical circulates through the circulation line, then temperature control is achieved, but stagnation occurs in some positions
Solution Approach 1:
The circulation system is segmented into multiple flow paths by guide surfaces, ensuring that liquid flows through all regions of the tank including areas that would otherwise be stagnant, thereby improving circulation efficiency while maintaining temperature control
Solution Approach 2:
The guide surfaces extend in the vertical dimension to create three-dimensional flow paths, guiding liquid from the inlet region through various heights and positions to the outlet, preventing stagnation in any particular region
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration minimizes air bubble generation and stabilizes temperature distribution, enhancing the uniformity of chemical mixing and circulation within the apparatus.
Implementation Method 1
a first guide surface is provided between the outlet and the inlet... the first guide surface is formed so a flow of a liquid introduced from the inlet is guided further away from the outlet
Implementation Method 2
a pump provided at the first line and for generating a flow of a liquid from the liquid outlet pipe to the liquid inlet pipe
Implementation Method 3
the chemical is mixed by circulating the chemical along a circulation line provided with a temperature control member, and a temperature of the chemical is adjusted
Data Source
AI summary
The inventive concept provides a liquid storage unit. The liquid storage unit includes a tank housing defining a storing space therein; a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and wherein a first guide surface is provided between the outlet and the inlet.