Liquid Storage Tank Level Detection Using Variable-Width Fin Vibration
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Solution Overview
Problem
Existing liquid level detection methods in tanks, such as float type sensors and capacitive sensors, face challenges when dealing with flammable liquids or metals near the sensor, leading to potential safety risks and detection inaccuracies.
Innovation Solution
A vibration-based method using a fin with varying width dimensions applied to the liquid surface to generate waves, detected by a piezoelectric element, which correlates the amplitude of these waves with the liquid level for accurate identification.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If float type sensors or capacitive sensors are used for liquid level detection, then liquid level can be detected, but safety risks arise when dealing with flammable liquids or metals near the sensor
Solution Approach 1:
The patent replaces electrical sensing mechanisms (float type sensors, capacitive sensors) with a mechanical vibration-based detection system. A vibration source generates waves in the liquid, and a detector measures wave characteristics to determine liquid level, eliminating the need for electrical components near the liquid and thus resolving safety risks with flammable liquids.
Solution Approach 2:
The patent introduces mechanical waves as an intermediary to transfer information about liquid level. Instead of using electrical fields that directly interact with the liquid or nearby metals, the system uses wave propagation through the liquid as a safe intermediary carrier of measurement information.
2Measurement precision
If capacitive sensors are used for liquid level detection, then liquid level can be detected, but detection inaccuracies occur due to metal interference
Solution Approach 1:
The patent replaces electrical field-based capacitive sensing with mechanical wave-based sensing. Since mechanical waves propagate through the liquid itself rather than through electrical fields, they are not affected by nearby metals, thereby eliminating detection inaccuracies caused by metal interference.
Solution Approach 2:
The patent converts the potential harm of metal interference with electrical fields into a benefit by using a completely different physical domain (mechanical waves) that is inherently immune to such interference, thereby achieving robust detection in electrically noisy environments.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables safe and precise liquid level detection without direct electrical contact, overcoming safety concerns and metal interference, and allowing for timely tank replacement and process control.
Implementation Method 1
a vibration applier configured to apply a vibration to the fin
Implementation Method 2
detect the vibration when a wave formed on a surface of the liquid reaches an inner wall surface of the tank by the fin
Data Source
AI summary
A technique for identifying a level of a liquid in a tank based on vibration applied to the liquid is provided. In a device for storing the liquid used to process a substrate, a fin is inserted into the tank that stores the liquid. A width dimension of the fin in a direction intersecting a surface of the liquid varies according to a position in a depth direction of the liquid. A vibration applier applies the vibration to the fin. A vibration detector detects the vibration when a wave formed on a liquid surface of the liquid reaches an inner wall surface of the tank by the fin to which the vibration is applied. A liquid level identifier identifies the liquid level of the liquid in the tank based on a correspondence relationship between a magnitude of an amplitude of the detected vibration and the width dimension of the fin.