Liquid Trap Tank Inlet Flow Structure for Air Bubble Suppression
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Solution Overview
Problem
Air bubbles in liquid supplies for semiconductor manufacturing can deteriorate the quality of semiconductor devices, necessitating a solution to suppress or remove them.
Innovation Solution
A liquid trap tank with an inlet pipe portion and a flow directing portion that induces a laminar flow to suppress air bubble generation, featuring a full pipe with a partially open inner portion and a vertical arrangement to guide liquid flow, ensuring air bubbles rise to the surface without reaching the outlet.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If liquid is supplied through a conventional inlet pipe, then liquid supply is simple and direct, but air bubbles are generated due to liquid drop impact
Solution Approach 1:
The patent introduces an intermediary structure (flow directing portion with partial pipe) between the inlet pipe and the liquid flow path. This partial pipe acts as a mediator that guides the liquid flow smoothly, preventing direct impact and air bubble generation while maintaining a relatively simple overall structure.
Solution Approach 2:
The patent adds a dimensional element by extending the inlet pipe vertically and incorporating a partial pipe that creates a multi-dimensional flow path. This vertical arrangement and partial openness in the lateral direction allows liquid to flow smoothly without impact, resolving the contradiction between simplicity and bubble suppression.
2Object-affected harmful factors
If the inlet pipe is a full closed pipe, then structure is simple, but liquid flow induces air bubbles due to dropping
Solution Approach 1:
The patent applies local quality by making only a portion of the pipe open (partial pipe) rather than the entire pipe. The partial pipe is open in the lateral direction at specific locations to guide flow and suppress bubbles, while maintaining closed structure in other areas, thus balancing manufacturing ease with bubble suppression functionality.
3Object-affected harmful factors
If liquid flows directly from inlet to outlet, then flow path is short and simple, but air bubbles are generated and transported to outlet
Solution Approach 1:
The patent employs curvature by extending the inlet pipe vertically and using a partial pipe that creates a curved, smooth flow path. This curved configuration allows liquid to flow gradually without abrupt changes in direction, preventing air bubble generation while keeping the flow path relatively compact and efficient.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses air bubble generation and removes existing bubbles, enhancing the quality of semiconductor device manufacturing by maintaining a stable liquid flow and minimizing bubble interference.
Implementation Method 1
a flow directing portion connected to the inlet pipe portion and configured to induce a flow of the liquid to suppress the generation of air bubbles
Implementation Method 2
allowing air bubbles to be removed... air bubbles introduced through the inlet pipe portion can rise to the upper portion of the tank body
Data Source
AI summary
A liquid trap tank and a liquid supply unit for the liquid trap tank are provided. The liquid trap tank includes a tank body which has an accommodating space formed therein to accommodate a liquid and has an inlet portion formed on one side and an outlet portion formed on an opposite side; and a liquid supply unit coupled to the inlet of the tank body to supply the liquid from the outside of the tank body to the accommodating space, wherein the liquid supply unit comprises an inlet pipe portion coupled to the inlet portion to introduce the liquid into the accommodating space and a flow directing portion connected to the inlet pipe portion and configured to induce a flow of the liquid to suppress generation of air bubbles due to a drop of the liquid passing through the inlet pipe portion.