Lithium Deposit Removal via Precursor Chemical Vapor

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Solution Overview

Problem

Conventional methods for removing lithium-containing deposits from processing chambers are inefficient, often requiring manual cleaning that causes significant downtime and fails to thoroughly remove deposits, especially from complex multilayer battery processing chambers, leading to contamination and defects in subsequent processing.

Innovation Solution

The method involves heating the surface of lithium-containing deposits within the processing chamber using hydrogen or nitrogen-containing precursors to produce volatile byproducts, which are then exhausted, allowing for in situ cleaning without exposing the chamber to the atmosphere, maintaining vacuum conditions and controlling temperatures to prevent lithium melting, and using specific removal precursors to convert surface materials into volatile compounds for effective removal.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If manual cleaning methods are used to remove lithium-containing deposits, then the deposits can be removed from the processing chamber, but significant downtime is caused and the cleaning process is inefficient

Engineering Contradiction:

Improvedeposit removal effectivenessVSAvoiddowntime

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent replaces manual mechanical cleaning with an automated chemical vapor deposition-based cleaning process. The system uses automated delivery of hydrogen-containing and nitrogen-containing precursors that chemically react with lithium deposits to form volatile compounds, eliminating the need for manual intervention and significantly reducing downtime while improving removal effectiveness.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the chemical and physical parameters within the processing chamber by introducing specific precursors (hydrogen-containing and nitrogen-containing) at controlled temperatures. These parameter changes enable the conversion of non-volatile lithium deposits into volatile byproducts that can be efficiently removed, creating an automated and time-efficient cleaning process.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If conventional cleaning methods are used, then some deposits may be removed, but the cleaning is incomplete especially from complex multilayer battery processing chambers, leading to contamination

Engineering Contradiction:

Improvedeposit removal completenessVSAvoidcontamination

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent employs chemically reactive precursors that vigorously react with lithium deposits. The hydrogen-containing precursor reacts to form lithium hydride or hydroxide, while the nitrogen-containing precursor reacts to form lithium nitride or amide. These strong chemical reactions ensure complete conversion of deposits into volatile byproducts, achieving thorough cleaning and preventing contamination in complex multilayer battery processing chambers.

Inventive Principle:

Principle #38Strong oxidants (Accelerated oxidation)

3Reliability

If the processing chamber is opened for manual cleaning, then deposits can be removed, but the vacuum conditions are lost and the chamber must be resealed

Engineering Contradiction:

Improvedeposit removalVSAvoidchamber operation complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent enables the processing chamber to clean itself through automated in-situ chemical reactions. The system delivers precursors that react with deposits directly within the sealed chamber, converting them to volatile byproducts that are pumped away. This self-cleaning capability eliminates the need to open and reseat the chamber, maintaining vacuum conditions and simplifying operation.

Inventive Principle:

Principle #25Self-service

4Reliability

If high temperature is applied to remove deposits, then deposits can be effectively removed, but lithium may melt and cause additional contamination

Engineering Contradiction:

Improvedeposit removal effectivenessVSAvoidlithium melting and contamination

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent changes the chemical parameters by introducing reactive precursors that enable deposit removal at lower temperatures. The chemical reactions between the precursors and lithium deposits proceed effectively at temperatures below lithium's melting point, converting deposits to volatile byproducts without causing lithium to melt and contaminate the chamber.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent utilizes phase transitions of the reaction byproducts rather than melting the lithium deposits directly. The chemical reactions convert solid lithium deposits into volatile gaseous byproducts that can be pumped away, achieving effective removal without subjecting lithium to temperatures that would cause melting.

Inventive Principle:

Principle #36Phase transitions

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables thorough and efficient removal of lithium-containing deposits, reducing downtime and contamination, while maintaining the integrity of the processing chamber, thereby improving the quality of device production and reducing defects.

Implementation Method 1

contacting the surface of the lithium-containing deposit with a hydrogen-containing precursor. The contacting may hydrogenate the surface of the lithium-containing deposit

Methodology Applied

Scientific EffectHydrogenation: Hydrogenation

Implementation Method 2

contacting the lithium-containing deposit with a nitrogen-containing precursor to form volatile byproducts

Methodology Applied

Scientific EffectChemical reaction: Chemical Bonding

Implementation Method 3

The surface of the lithium-containing deposit may be heated to a temperature of greater than or about 300° C., while a temperature of a bulk region of the lithium-containing deposit may be maintained below or about 200° C. The heating may be performed with a heater positioned within the processing chamber

Methodology Applied

Scientific EffectThermal heating: Heating

Implementation Method 4

exhausting the volatile byproducts of the lithium-containing deposit from the processing chamber. The method of removing lithium-containing deposits may be performed under vacuum conditions within the processing chamber

Methodology Applied

Scientific EffectVacuum exhaustion: Vacuum

Data Source

PatentUS12134822B2Cleaning materials and processes for lithium processing equipment

Publication Date: 2024.11.05 ELEVATED MATERIALS US LLC

AI summary

Exemplary methods of removing lithium-containing deposits may include heating a surface of a lithium-containing deposit. The surface may include oxygen or nitrogen, and the lithium-containing deposit may be disposed on a surface of a processing chamber. The methods may include contacting the surface of the lithium-containing deposit with a hydrogen-containing precursor. The contacting may hydrogenate the surface of the lithium-containing deposit. The methods may include contacting the lithium-containing deposit with a nitrogen-containing precursor to form volatile byproducts. The methods may include exhausting the volatile byproducts of the lithium-containing deposit from the processing chamber.