Lithographic Frame Vibration Isolation via Decoupled Utility Connection
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Solution Overview
Problem
In lithographic systems, the dynamic behavior of frames connected via flexible utility connections is compromised, particularly at higher frequencies, due to the dynamic stiffness of these connections, which can degrade vibration isolation performance.
Innovation Solution
A lithographic system is designed with a primary frame supported by a secondary frame, utilizing a vibration isolation body with a flexible passive body support to decouple the flexible utility connection from the primary frame, thereby reducing the impact of dynamic stiffness and improving isolation performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a flexible utility connection is used to connect functional units to auxiliary systems, then ease of installation and flexibility are improved, but the dynamic behavior of the frame deteriorates due to dynamic stiffness at higher frequencies
Solution Approach 1:
A vibration isolation body is introduced as an intermediary element between the frame and the flexible utility connection. This mediator absorbs and isolates the dynamic stiffness effects of the utility connection, preventing them from affecting the frame's dynamic behavior while still allowing the flexible connection to provide installation ease.
Solution Approach 2:
The problematic dynamic stiffness characteristic is extracted and isolated from the main frame system by attaching the flexible utility connection to a separate vibration isolation body. This separation removes the harmful dynamic effects from the critical frame structure while preserving the utility connection's flexibility benefits.
2Measurement precision
If a separate frame with sensor elements is mounted on a vibration isolation system, then measurement precision is improved, but device complexity increases due to additional frames and isolation systems
Solution Approach 1:
The vibration isolation functionality is merged with the existing frame structure by integrating the vibration isolation body into the frame design. This combination maintains the measurement precision benefits of isolated sensor mounting while reducing overall device complexity through functional integration.
3Reliability
If cooling systems and other functional units are physically connected to the frame, then functional reliability is improved, but thermal deformation and vibration isolation performance deteriorate
Solution Approach 1:
The system is segmented into distinct functional zones: the primary frame structure, the vibration isolation body, and the auxiliary systems including cooling units. This segmentation allows each component to perform its specific function independently - the frame provides structural support, the isolation body absorbs thermal and vibrational disturbances, and the auxiliary systems provide necessary functions without interfering with each other.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces the influence of dynamic stiffness on the primary frame's behavior, maintaining isolation performance across a wider frequency range and preventing resonance issues, thus enhancing the overall dynamic behavior of the lithographic system.
Implementation Method 1
a vibration isolation body having a body mass, which is moveably connected to the secondary frame by a flexible passive body support having a body support stiffness
Data Source
AI summary
The present invention relates to a lithographic apparatus, comprising: —a primary frame (10) which is provided with a functional unit (11, 12, 14), —a secondary frame (20), —a primary frame support (30), which is adapted to support the primary frame onto the secondary frame, —a flexible utility connection (40), adapted to connect the functional unit to an auxiliary system (51, 52, 53), —a vibration isolation body (60) having a body mass, which is moveably connected to the secondary frame by a flexible passive body support (61) having a body support stiffness, wherein the flexible utility connection is fixed to the vibration isolation body at a distance from the primary frame.