Lithographic Apparatus Intermediate Layer Peeling Resistance
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In lithographic apparatuses, hydrophobic coatings on sensors and other objects tend to peel off, leading to imaging errors and loss of desired properties, due to inadequate adhesion, which can result in particle generation and thermal instability.
Innovation Solution
An intermediate layer with a bond strength greater than that between the intermediate layer and the upper layer, and with Young's Modulus and Poisson ratio within 20% of the upper layer, is introduced between the upper hydrophobic layer and the substrate or lower layer to enhance adhesion and prevent peeling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a hydrophobic coating is applied to sensors and objects in lithographic apparatuses, then liquid resistance and thermal stability are improved, but adhesion deteriorates causing the coating to peel off
Solution Approach 1:
An intermediate layer is introduced between the hydrophobic coating and the substrate. This intermediate layer has a bond strength greater than that between the hydrophobic coating and the substrate, effectively mediating the adhesion issue while preserving the hydrophobic properties of the coating layer.
Solution Approach 2:
The solution employs a composite structure consisting of multiple layers: the substrate, the intermediate layer with optimized bond strength, and the hydrophobic coating layer. This composite material approach allows each layer to fulfill its specific function - the intermediate layer provides strong adhesion while the hydrophobic coating maintains liquid resistance and thermal stability.
2Strength
If a coating layer is applied to prevent peeling, then adhesion is improved, but device complexity increases
Solution Approach 1:
The coating structure is segmented into distinct functional layers: an intermediate layer responsible for adhesion and a hydrophobic coating layer responsible for liquid resistance. This segmentation allows each layer to be optimized independently for its specific function while maintaining overall system simplicity.
Data Source
Figure 1
Figure 2
Figure 3~5
AI summary
A lithographic apparatus comprising: an object, the object comprising: a substrate and optionally a lower layer on the substrate; an upper layer; and an intermediate layer between the upper layer and the substrate, wherein a bond strength between the intermediate layer and the substrate or lower layer being greater than a bond strength between the intermediate layer and the upper layer and the intermediate layer has a Young's Modulus and/or a Poisson ratio within 20% of that of the upper layer.