Lithographic Clamp Thermal Insulation and Fluid Channels

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Solution Overview

Problem

Lithographic apparatuses using extreme ultraviolet (EUV) radiation face challenges with unwanted infrared (IR) and deep ultraviolet (DUV) radiation causing heat damage and deformation issues due to the absorption of non-EUV radiation, which existing technologies struggle to mitigate effectively.

Innovation Solution

A clamp system with thermally insulated voids and fluid channels is employed to control the temperature of objects within the lithographic apparatus, using a fluid conditioning device to adjust the temperature of the fluid passing through channels to maintain the object at a zero-crossing temperature, thereby minimizing internal thermal forces and deformation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a clamp system with fluid channels is used to control temperature, then temperature control capability is improved, but device complexity increases

Engineering Contradiction:

Improvetemperature control capabilityVSAvoiddevice complexity

Core Design Contradiction:

TemperatureVSDevice complexity

Solution Approach 1:

The clamp is divided into multiple segments with individual fluid channels, allowing independent temperature control of different regions. This segmentation enables precise local temperature management while keeping each channel relatively simple in design.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The clamp structure serves multiple functions: it provides mechanical clamping force, acts as a thermal management system through integrated fluid channels, and offers structural support. This multi-functionality reduces the need for separate components, thereby managing complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Temperature

If voids are introduced for thermal insulation, then thermal insulation performance is improved, but device complexity increases

Engineering Contradiction:

Improvethermal insulation performanceVSAvoiddevice complexity

Core Design Contradiction:

TemperatureVSDevice complexity

Solution Approach 1:

The voids are nested within the clamp structure, with insulating material placed inside the clamp body. This nesting approach provides effective thermal insulation while utilizing the existing clamp geometry, avoiding the need for separate insulation components.

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

Thermal insulation is applied locally at specific regions where heat transfer needs to be controlled, rather than uniformly throughout the entire structure. This localized approach optimizes insulation performance where needed while minimizing added complexity.

Inventive Principle:

Principle #3Local quality

3Object-affected harmful factors

If spectral purity filters are used to remove non-EUV radiation, then radiation quality is improved, but device complexity increases

Engineering Contradiction:

Improveradiation qualityVSAvoiddevice complexity

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

Spectral purity filters are introduced as intermediary components in the radiation path to selectively remove non-EUV radiation. These filters act as mediators between the radiation source and the workpiece, improving radiation quality without requiring fundamental changes to the source or processing system.

Inventive Principle:

Principle #24Intermediary (Mediator)

4Temperature

If cooling fluid is circulated through the clamp, then temperature regulation is improved, but device complexity increases

Engineering Contradiction:

Improvetemperature regulationVSAvoiddevice complexity

Core Design Contradiction:

TemperatureVSDevice complexity

Solution Approach 1:

A fluid circulation system is implemented using hydraulic or pneumatic principles, where cooling fluid is pumped through channels in the clamp. This approach provides effective temperature regulation through established fluid dynamics mechanisms while using conventional, well-understood system components.

Inventive Principle:

Principle #29Pneumatics and hydraulics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively reduces deformation and overlay errors by maintaining the object at a zero-crossing temperature, ensuring precise temperature control and minimizing thermal stress, thus enhancing the accuracy and stability of the lithographic process.

Implementation Method 1

The chuck defines at least one void configured to thermally insulate the chuck from the clamp

Methodology Applied

Scientific EffectThermal insulation: Thermal Insulation

Implementation Method 2

a fluid conditioning device to adjust the temperature of the fluid passing through channels to maintain the object at a zero-crossing temperature

Methodology Applied

Scientific EffectHeat exchange: Heat Exchanger

Data Source

PatentUSRE49066E1Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus

Publication Date: 2022.05.10 ASML HLDG NV

AI summary

A lithographic apparatus includes a clamp (406) configured to receive an object (402). The clamp defines at least one channel (408) configured to pass a fluid at a first fluid temperature. The lithographic apparatus also includes a chuck (404) coupled to the clamp. The chuck (404) defines at least one void (464) configured to thermally insulate the chuck from the clamp.