Lithographic Electrical Connector Arcing Control
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Solution Overview
Problem
High voltage electrical connectors in low-pressure environments are prone to arcing, which poses safety hazards and reduces the reliability of lithographic apparatuses due to the difficulty in preventing leaks in existing sealed systems.
Innovation Solution
An electrical connector system featuring a housing with conducting surfaces and insulating sleeves surrounding cable insertion parts, where the housing surrounds the cable insertion parts to control the electric field and prevent arcing, and the connectors are designed to operate effectively at both low and atmospheric pressures without requiring a gas-tight seal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a sealed cavity system is used to keep insulators immersed in gas atmosphere, then arcing along insulator surfaces is reduced, but system leaks become difficult to prevent and reliability decreases
Solution Approach 1:
The patent extracts the insulator from the vacuum environment by providing it with a coating that prevents arcing without requiring the insulator to be immersed in gas. The coating layer is applied directly to the insulator surface, eliminating the need for complex sealed cavity systems while maintaining protection against arcing in vacuum conditions.
Solution Approach 2:
The patent introduces a coating layer as an intermediary substance between the insulator and the vacuum environment. This coating serves as the active element that prevents arcing, replacing the need for gas atmosphere immersion and eliminating the reliability issues associated with sealed cavity systems.
2Productivity
If high voltage is used to power actuators and blades in low-pressure environment, then lithographic processes can be performed, but electrical breakdown may occur creating safety hazards
Solution Approach 1:
The patent converts the potential harmful effect of electric field concentration at insulator surfaces into a beneficial outcome by applying a specialized coating that prevents arcing. The coating transforms the insulator surface properties to eliminate the harmful discharge effect while maintaining the necessary high voltage operation for lithographic processes.
Solution Approach 2:
The patent changes the surface properties of the insulator by applying a coating with specific electrical characteristics. This parameter change in the insulator surface prevents electrical breakdown and arcing, enabling safe high voltage operation in the low-pressure lithographic environment.
3Ease of operation
If conventional electrical connectors are used in vacuum, then connections can be made, but arcing occurs from cables to nearby conductors
Solution Approach 1:
The patent extracts the arcing problem from the connection system by applying a coating to the insulator surfaces within the connector. This removes the need for complex vacuum-rated connectors while preventing arcing from cables to nearby conductors through the coated insulator protection.
Solution Approach 2:
The patent introduces a coating layer as an intermediary protective barrier on the insulator surfaces of the electrical connector. This coating prevents direct arcing between cables and nearby conductors, enabling reliable electrical connections in vacuum conditions without modifying the basic connector structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces arcing and enhances safety by controlling the electric field within the connectors, ensuring reliable operation across varying pressure conditions, thus preventing electrical breakdown and maintaining system integrity.
Implementation Method 1
an insulating sleeve surrounding the electrical conductor, wherein the housing surrounds the cable insertion parts
Data Source
AI summary
An electrical connector suitable, for example, for connecting high voltage carrying cables in a low pressure environment comprises a housing having a conducting surface and a plurality of cable insertion parts, each cable insertion part comprising an electrical conductor configured to connect to an electrical cable and an insulating sleeve surrounding the electrical conductor, wherein the housing surrounds the plurality of cable insertion parts.