Lithographic Apparatus Heater Device for Thermal Control
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Solution Overview
Problem
Lithographic apparatuses face challenges in maintaining accurate temperature control due to heat generated by components like motors and sensors, which can lead to positioning errors and reduced accuracy in patterning.
Innovation Solution
A lithographic apparatus design featuring a first body with a heat source and a second body separated by a gap, where a heater device on the second body directly influences its temperature, allowing for efficient temperature control by compensating for heat flux variations from the heat source.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a coil fluid cooling system is used to cool the motor coil, then the heat generated by the coil is reduced, but the temperature control has time lag and low bandwidth
Solution Approach 1:
A heater device is introduced as an intermediary element attached to the facing surface of the second body. This heater device directly compensates for heat flux variations from the heat source by providing or absorbing heat locally, thereby eliminating the time lag associated with remote fluid cooling systems and enabling rapid temperature control with high bandwidth.
2Temperature
If the heater device is placed far from the heat source, then the heat compensation is less effective, but the device complexity is reduced
Solution Approach 1:
The heater device is extracted and placed on the facing surface of the second body, separated from the heat source on the first body. This spatial separation simplifies the overall device configuration while maintaining effective temperature control through direct thermal coupling with the second body, allowing independent optimization of the heater device without complicating the motor assembly.
3Temperature
If the gap between the first and second bodies is increased, then the heat transfer from the heat source is reduced, but the temperature control precision is worsened
Solution Approach 1:
The heater device acts as a thermal intermediary between the gap and the second body. It directly compensates for heat flux variations transmitted through the gap, enabling the gap to be sufficiently large to reduce unwanted heat transfer from the heat source while maintaining temperature control precision through active compensation rather than relying solely on passive thermal isolation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design maintains a stable temperature in the lithographic apparatus, improving accuracy and reducing the impact of heat-generated errors, with the heater device requiring only a small amount of power to compensate for large changes in heat flux from the heat source.
Implementation Method 1
The heat source is for providing a heat flux to the second body via the gap. The heater device is configured to provide a further heat flux to the second body.
Implementation Method 2
The heat source is for providing a heat flux to the second body via the gap between the first and second bodies.
Data Source
AI summary
A lithographic apparatus including a first body including a heat source, a second body and a heater device is presented. The second body has a facing surface facing the first body via a gap between the first and second bodies. The heat source is for providing a heat flux to the second body via the gap. The heater device is attached to the facing surface. The heater device is configured to provide a further heat flux to the second body.