3D Lithographic Structure Jacket Wall Polymerization

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Solution Overview

Problem

Existing lithographic methods for producing three-dimensional structures with high design freedom and precision are time-consuming, especially when large-volume structures with small features are required, due to the need for detailed spatial resolution in all areas.

Innovation Solution

A method involving a spatially resolving first energy input to define a jacket wall around a volume of lithographic material, followed by partial removal of the surrounding material and subsequent non-spatially resolving energy input for polymerization, allowing for rapid prototyping with internal support structures that maintain dimensional stability without the need for external support structures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If spatially resolved energy input method is used for entire structure polymerization, then high spatial resolution is achieved, but process time is significantly extended

Engineering Contradiction:
Improvespatial resolutionVSAvoidprocess time
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The structure is segmented into two functional parts: a jacket wall requiring high spatial resolution and an internal volume requiring only polymerization. The method applies different energy input strategies to each segment - spatially resolved method for the jacket wall and non-spatially resolving method for the internal volume, thereby resolving the contradiction between resolution and productivity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different quality requirements are applied to different parts of the structure. The jacket wall is produced with high spatial resolution to define precise external geometry, while the internal volume is polymerized without spatial resolution requirements, optimizing the process for each local region's specific needs

Inventive Principle:
Principle #3Local quality

2Stability of the object's composition

If external support structures are added for large-volume sections, then dimensional stability is improved, but device complexity and post-processing time increase

Engineering Contradiction:
Improvedimensional stabilityVSAvoidstructure complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The jacket wall structure serves its own support function by enclosing and defining the internal volume. The polymerized jacket wall provides structural stability to the unfinished structure during processing, eliminating the need for separate external support structures and reducing overall device complexity

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The jacket wall performs multiple functions simultaneously: it defines the external geometry of the structure with high precision, encloses the internal volume, and provides structural support during the polymerization process, replacing what would otherwise require separate support structures

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces process time while ensuring high spatial resolution and dimensional stability, allowing for the production of structures with varying mechanical and optical properties, and eliminates the need for post-processing and waste removal of external support structures.

Implementation Method 1

a first, spatially spatially resolving energy input method is used to polymerize the jacket wall in the lithographic material

Methodology Applied
Scientific EffectPhotopolymerisation: Photopolymerisation

Implementation Method 2

The volume of lithography material enclosed by the jacket wall is then polymerized, in other words solidified or cured, using a second energy input method

Methodology Applied
Scientific EffectPhotopolymerisation: Photopolymerisation

Data Source

PatentEP3012688B2Method for producing a three-dimensional structure
Publication Date: 2023.02.08 NANOSCRIBE GMBH
  • EP3012688B2 patent drawingFigure 1~2
  • EP3012688B2 patent drawingFigure 3~4
  • EP3012688B2 patent drawingFigure 5~6

AI summary

The invention relates to a method for producing a three-dimensional structure in a lithographic material that can be polymerized and thereby solidified by means of energy input methods, wherein first, a shell wall of the structure to be produced is polymerized by means of a first spatially resolving energy input method such that a volume of unpolymerized lithographic material is enclosed, wherein in an intermediate development step, the lithographic material surrounding the polymerized shell is removed, and wherein, subsequently, the volume enclosed by the shell is polymerized by means of a second energy input method.