Lithographic Projection Objective Repair via Segmented Optical Element Replacement
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Solution Overview
Problem
Lithography projection exposure apparatuses face downtime and high costs due to the need for replacing entire optical systems when individual optical elements degrade, which is inefficient and time-consuming, especially when maintaining or altering image quality to meet customer-specific requirements.
Innovation Solution
A method that allows for the replacement and adjustment of individual optical elements within the projection objective without replacing all elements, using spare optical elements that can be worked to compensate for degradation, with the option to maintain or alter image quality, reducing downtime and costs by performing repairs in the field without shipping the objective to the manufacturer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the entire optical system is replaced when individual optical elements degrade, then the image quality is maintained, but the downtime and costs increase significantly
Solution Approach 1:
The optical system is divided into individual replaceable optical elements (lenses, mirrors, prisms) that can be independently exchanged. This segmentation allows only the degraded elements to be replaced rather than the entire system, reducing downtime while maintaining image quality through selective component replacement.
Solution Approach 2:
Spare optical elements are pre-characterized with their specific optical parameters and aberration profiles. When replacing degraded elements, the system adjusts optical parameters (positioning, alignment, compensation elements) to compensate for differences between original and spare elements, maintaining image quality despite parameter variations.
2Reliability
If the entire optical system is replaced when individual optical elements degrade, then the image quality is maintained, but the costs increase significantly
Solution Approach 1:
The optical system is segmented into individually replaceable elements, allowing cost-effective replacement of only the degraded components rather than the expensive entire system. This reduces material loss and associated costs while maintaining overall image quality.
Solution Approach 2:
Degraded optical elements are removed and replaced with spare elements from inventory. The removed elements can be recovered, reconditioned, and returned to service or inventory, reducing waste and costs. Spare elements are maintained in stock for rapid replacement without requiring new manufacturing.
3Loss of time
If spare optical elements are used to replace degraded elements, then downtime is reduced, but the image quality may vary due to differences between original and spare elements
Solution Approach 1:
When spare optical elements are installed, the system performs parameter adjustments including positioning adjustments, alignment modifications, and activation of compensation optical elements. These parameter changes compensate for manufacturing tolerances and individual element variations, maintaining consistent image quality across different element combinations.
Solution Approach 2:
The system includes measurement and adjustment mechanisms that detect image quality variations after spare element installation. Real-time feedback from quality measurements drives automated or manual adjustments to optical parameters, ensuring image quality consistency despite using different spare elements.
4Ease of repair
If the projection objective is shipped to the manufacturer for repair, then thorough repairs can be performed, but the downtime increases
Solution Approach 1:
The degraded optical elements are extracted and removed from the projection objective, allowing rapid on-site replacement with spare elements. This extraction approach enables critical repairs to be performed in the field without shipping the entire objective, maintaining high repair quality for the replaced elements while minimizing system downtime.
Solution Approach 2:
The system is designed to enable self-service field repairs where operators can replace degraded optical elements with spares using standardized interfaces and procedures. This self-service capability allows thorough replacement repairs to be performed on-site without manufacturer intervention, dramatically reducing downtime while maintaining repair quality through proper training and procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces downtime and costs by allowing for on-site repair and adjustment of image quality, maintaining or improving the original image quality of the projection objective, and enabling customization to meet customer-specific imaging settings, while utilizing a pool of re-worked spare parts to correct optical effects.
Implementation Method 1
The plurality of optical elements includes a first optical element having a refractive power
Data Source
AI summary
Projection objectives, such as projection objectives of lithography projection exposure apparatuses, as well as related systems, components and methods, such as methods of revising and/or repairing such objectives, are disclosed.