Lithographic Apparatus 2D Run Length Encoding Data Compression
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Solution Overview
Problem
Conventional lithographic apparatuses face difficulties in efficiently processing and transmitting large bitmap representations of complex device patterns due to storage and data conversion challenges, making it hard to generate control signals in real time for patterning arrays.
Innovation Solution
A data processing pipeline comprising an offline pre-processing device and an online rasterizer that converts high-level descriptive representations into an intermediate form, which can be efficiently rasterized and stored, producing bitmap data in real time to control the patterning array.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If high-level descriptive representations are converted to bitmap data to generate control signals for patterning arrays, then the control signals can be generated, but the enormous size of bitmap representations causes difficulties in storage, data conversion, and transmission
Solution Approach 1:
The patent segments the bitmap data processing into two distinct phases: offline pre-processing to generate compressed run-length encoded representations, and online rasterization to generate control signals. This segmentation allows the system to handle large bitmap data volumes by processing them in manageable segments rather than as a single large dataset.
Solution Approach 2:
The patent applies preliminary action by performing offline pre-processing of the bitmap data before the actual exposure process. During this preliminary phase, the system converts bitmap data to run-length encoded format, reducing the data volume and preparing it for efficient online processing. This preliminary compression step eliminates the need to store and process the full bitmap data during real-time operations.
2Productivity
If bitmap data is processed in real time to control patterning arrays, then exposure can be performed efficiently, but the computational operations and memory requirements become prohibitively large
Solution Approach 1:
The patent changes the data representation parameters from full bitmap format to run-length encoded format. This parameter change reduces the amount of data that needs to be processed and stored, thereby reducing computational operations and memory requirements while maintaining the ability to generate control signals in real time for efficient exposure.
3Area of stationary object
If the exposure region covers only a portion of the substrate width, then the apparatus can be more compact, but multiple scans are required increasing processing time
Solution Approach 1:
The patent applies preliminary action by pre-processing and compressing the pattern data offline before the actual exposure process. This allows the system to efficiently handle multiple scans by having the compressed run-length encoded data ready in advance, reducing the time penalty associated with multiple scans compared to a single large exposure region.
Data Source
AI summary
A lithographic apparatus comprises an array of individually controllable elements and a data processing pipeline. The array of individually controllable elements modulates a beam of radiation. The data processing pipeline converts a first representation of a requested dose pattern to a sequence of control data suitable for controlling the array of individually controllable elements in order substantially to form the requested dose pattern on a substrate. The data processing pipeline comprises an offline pre-processing device and an online rasterizer. The offline pre-processing device converts the first representation of the requested dose pattern to an intermediate representation, which can be rasterized in a fewer number of operations than the first representation. The storage device stores the intermediate representation. The online rasterizer accesses the stored intermediate representation and produces therefrom a stream of bitmap data to be used to generate the sequence of control data substantially in real time.