Lithographic Swap Bridge Isolation for Positioning Accuracy
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Solution Overview
Problem
Conventional lithographic apparatuses experience dynamical disturbances and decreased positioning accuracy due to the mass of the swap bridge being added to the moveable parts of the short stroke module, and dynamical coupling between short and long stroke modules, which affects the dynamic behavior and throughput.
Innovation Solution
A lithographic apparatus with a bridge holder dynamically isolated from the moveable parts of the short stroke modules and coupled to a stationary part, allowing the swap bridge to be isolated from both short and long stroke modules, reducing dynamical disturbances and enabling better dynamic behavior and quick deployment between configurations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the swap bridge is carried by the moveable part of the short stroke module, then the swap bridge can be transported between stages, but the positioning accuracy decreases due to increased mass and dynamical disturbance
Solution Approach 1:
The system is divided into three independent components: the swap bridge, the bridge holder, and the short stroke module. The bridge holder is separately mounted on the stationary part, while the swap bridge is coupled between the bridge holder and the short stroke module. This segmentation allows the swap bridge to be transported without adding its mass to the moveable part of the short stroke module, thus maintaining positioning accuracy while enabling operational flexibility.
Solution Approach 2:
The bridge holder acts as an intermediary component that mediates between the swap bridge and the short stroke module. It provides a mounting point for the swap bridge on the stationary part while allowing the swap bridge to be coupled to the short stroke module during operation. This intermediary structure eliminates the need for the short stroke module to directly support the swap bridge's mass.
2Adaptability or versatility
If the swap bridge is coupled to both short and long stroke modules, then the stages can be connected for joint movement, but dynamical coupling causes disturbances to be transmitted between modules
Solution Approach 1:
The coupling path is segmented into two separate connections: one from the swap bridge to the short stroke module, and another from the bridge holder to the long stroke module. This segmentation ensures that the swap bridge is only dynamically coupled to the short stroke module, while the long stroke module couples to the bridge holder. As a result, dynamical disturbances in the long stroke module cannot be transmitted to the short stroke module through the swap bridge.
Solution Approach 2:
The bridge holder serves as an intermediary that decouples the dynamic pathways between the long stroke module and the short stroke module. By mounting the bridge holder on the stationary part rather than directly coupling it to the short stroke module, it breaks the direct dynamic transmission path, allowing joint movement capability while preventing harmful dynamical coupling.
3Reliability
If the bridge holder is coupled to the moveable part of the short stroke module, then the swap bridge can be held securely, but dynamical disturbances are generated and transmitted to the short stroke module
Solution Approach 1:
The bridge holder is mounted on the stationary part of the lithographic apparatus rather than on the moveable part of the short stroke module. This intermediary mounting position provides a stable, disturbance-free base for holding the swap bridge. The bridge holder still allows the swap bridge to be securely held and coupled to the short stroke module when needed, but without transmitting dynamical disturbances to the short stroke module.
Data Source
AI summary
A lithographic apparatus includes two stages that are each configured to hold a substrate, wherein each stage is provided with a short stroke module to move a table with a substrate and a long stroke module to move the short stroke module of that stage. The lithographic apparatus includes a swap bridge to couple the stages, and wherein, in use, in a first configuration, the stages are moveable with respect to each other, and wherein, in use, in a second configuration, the stages are coupled via the swap bridge to make a joint movement.