Lithography Abnormality Diagnosis Using Condition-Specific Lot Data
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Solution Overview
Problem
Existing lithography apparatuses face challenges in precisely judging abnormalities due to varying normal state ranges based on processing conditions, which affects their performance and productivity in manufacturing articles like semiconductor devices and MEMS.
Innovation Solution
An information processing apparatus and method that utilize a diagnosis system to acquire and analyze lot data, accumulate it with reference data, and determine maintenance methods based on abnormality judgments, considering specific processing conditions to accurately identify and address abnormalities in lithography apparatuses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a fixed normal state range is used for abnormality judgment, then the judgment process is simple, but the judgment precision deteriorates because the normal state range varies with processing conditions
Solution Approach 1:
The patent applies dynamics by making the normal state range adjustable and adaptable rather than fixed. The system dynamically determines appropriate normal state ranges based on different processing conditions, allowing the judgment criteria to flex and change according to operational context. This resolves the contradiction by enabling high precision across varying conditions without requiring an overly complex system, as the adaptation is automated through the determination unit.
Solution Approach 2:
The patent changes the parameter of the normal state range itself, transforming it from a static fixed value to a dynamic parameter that varies with processing conditions. The determination unit modifies the normal state range parameters based on detected processing conditions, ensuring that abnormality judgment maintains high precision across different operational states without increasing system complexity through manual intervention.
2Measurement precision
If manual determination of normal state range is performed, then the judgment accuracy is high, but the productivity deteriorates due to increased manual operation time
Solution Approach 1:
The patent implements self-service by enabling the determination unit to automatically determine appropriate normal state ranges based on processing conditions without requiring manual engineer intervention. The system serves itself by autonomously adapting its judgment criteria, thereby maintaining high judgment accuracy while eliminating the time-consuming manual operations that would reduce productivity.
Solution Approach 2:
The system uses feedback from detected processing conditions to automatically adjust the normal state range. The determination unit receives information about current processing conditions and uses this feedback to dynamically set appropriate normal state ranges, achieving both high accuracy and high productivity through automated closed-loop control rather than manual open-loop adjustment.
3Measurement precision
If processing condition-specific normal state ranges are used, then the abnormality judgment precision is improved, but the device complexity increases due to multiple range settings
Solution Approach 1:
The patent uses dynamics to automatically manage multiple normal state ranges through the determination unit, which dynamically selects and adjusts the appropriate range based on detected processing conditions. This eliminates the need for manual management of multiple ranges, achieving high judgment precision across different conditions while keeping the system manageable through automated adaptation rather than static complexity.
Solution Approach 2:
The determination unit performs preliminary action by pre-determining appropriate normal state ranges based on processing conditions before abnormality judgment is performed. This proactive setup ensures that the correct reference range is already in place when needed, achieving high precision without requiring complex real-time adjustments or manual intervention during the judgment process.
Data Source
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AI summary
An information processing apparatus (300) includes an acquisition unit configured to classify and acquire a plurality of pieces of collected data collected in a state where lithographic processing is executed by a lithography apparatus for forming a pattern by applying a plurality of processing conditions, based on the processing conditions, and a judgement unit configured to judge that an abnormality has occurred in the acquired collected data by judging whether the collected data falls within an allowable range specified based on the processing conditions.