Lithography Beam Shaping Fingers for Intensity Uniformity Control
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Solution Overview
Problem
Existing lithographic apparatuses face challenges in controlling the cross-sectional intensity of radiation beams, leading to non-uniformity and errors in pattern transfer, which affects the quality and efficiency of lithography processes.
Innovation Solution
The implementation of an illumination adjustment apparatus with actuators and finger structures made of beryllium alloy, coupled via magnets, allows independent movement to adjust the intensity cross-section of radiation beams, and a fluid channel for cooling to manage thermal issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If uniformity correction devices employ actuated fingers inserted into the radiation beam to correct intensity variations, then intensity uniformity is improved, but the spatial breadth of adjustable illumination is limited by finger sizes and actuating device dimensions
Solution Approach 1:
The illumination adjustment apparatus divides the correction function into multiple independent finger structures, each capable of independent movement. This segmentation allows each finger to independently adjust intensity in its specific region, achieving both high precision uniformity correction and broad spatial adjustability through coordinated movement of multiple segments.
Solution Approach 2:
The patent employs dynamic finger structures that can be moved independently using actuators during the lithography process. This dynamic capability allows the system to adapt to different illumination requirements and spatial regions, transforming a static correction system into a versatile, dynamically adjustable illumination control system.
2Manufacturing precision
If finger structures are made to be movable and independent for better intensity control, then manufacturing precision is improved, but device complexity increases due to multiple actuators and coupling mechanisms
Solution Approach 1:
The patent combines multiple actuators and coupling mechanisms into an integrated illumination adjustment apparatus. The actuators are strategically positioned and coupled to the finger structures through a unified mechanical system, allowing precise independent control of each finger while managing overall system complexity through coordinated design and integration.
3Manufacturing precision
If beryllium alloy material is used for finger structures to reduce vibrational effects, then manufacturing precision is improved, but device complexity and material cost increase
Solution Approach 1:
The patent specifies beryllium alloy material for the finger structures, utilizing the unique properties of this composite material to achieve high vibrational stability and manufacturing precision. The alloy's superior mechanical properties allow the finger structures to maintain their position and shape under varying operational conditions, reducing vibrational effects while achieving the desired precision.
4Reliability
If cooling fluid channels are added to manage thermal issues from actuators, then reliability is improved, but device complexity increases
Solution Approach 1:
The patent introduces cooling fluid channels as an intermediary thermal management system between the actuators and the surrounding environment. The cooling fluid acts as a mediator that absorbs heat from the actuators and transports it away from the critical components, preventing thermal buildup and improving system reliability while managing the added complexity through a standardized cooling approach.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the control of beam intensity uniformity, reducing errors in pattern transfer and improving the throughput and reliability of lithographic processes by mitigating vibrational and thermal effects.
Implementation Method 1
The actuators can comprise coils disposed on the plate. Ones of the finger structures can be coupled to corresponding ones of the actuators via magnets.
Implementation Method 2
Ones of the finger structures can be coupled to corresponding ones of the actuators via magnets.
Implementation Method 3
The plate can comprise a fluid channel distributed throughout the plate. The fluid channel can be configured to circulate a cooling fluid throughout the plate
Implementation Method 4
The finger structures can be configured to be moved independently using the actuators, to be disposed at least partially in a path of a beam of radiation to intercept at least a portion of the beam
Data Source
AI summary
An illumination adjustment apparatus includes a plate, actuators, and finger structures. The actuators include coils disposed on the plate. The finger structures include beryllium alloy material. Ones of the finger structures are coupled to corresponding ones of the actuators via magnets. The finger structures are moved independently using the actuators, are disposed at least partially in a path of a beam of radiation to intercept at least a portion of the beam, and adjust an intensity cross-section of the beam based on the moving and the intercepting.