Direct Optical Element Connection for Lithography
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Solution Overview
Problem
Current lithography apparatuses require complex and bulky designs due to indirect coupling of components with interfaces, leading to unnecessary structural space and potential for non-releasable connections, which complicates adjustments and increases the risk of undesired coupling.
Innovation Solution
A direct positively locking or force-locking connection between the optical element and a separate component, utilizing engagement sections and mating engagement elements that engage without additional components like screws or adhesives, allowing for a secure and adjustable connection without an interface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a component is connected indirectly to the optical element via an interface, then the component can be adjusted relative to the interface, but the design becomes bulky and requires more structural space
Solution Approach 1:
The patent extracts the interface from the connection path between the component and optical element. The component is connected directly to the optical element without an intermediate interface structure, eliminating the bulky interface while maintaining the connection functionality through direct engagement features.
Solution Approach 2:
The patent merges the functions of the component and interface by integrating the engagement features directly into the optical element. The component engages directly with engagement features on the optical element surface, combining what were previously separate elements (component + interface) into a direct connection.
2Reliability
If a component is connected indirectly to the optical element via an interface, then the connection can be made with additional components, but the design complexity increases and undesired coupling may occur
Solution Approach 1:
The patent removes additional connection components (screws, clamps, adhesives) from the assembly. The direct engagement features on the optical element surface enable the component to be connected without any intermediate fastening elements, reducing complexity while maintaining connection reliability through the direct positive or force-locking engagement.
Solution Approach 2:
The optical element surface provides self-contained engagement features that enable the component to connect and secure itself directly to the optical element. The engagement features (such as recesses, grooves, or textured surfaces) on the optical element surface allow the component to establish its own connection without external assistance from additional fastening components.
3Strength
If additional components like screws or adhesives are used to connect the component to the optical element, then a secure connection is achieved, but the connection becomes non-releasable or difficult to release
Solution Approach 1:
The patent implements a dynamic connection system where the component can be easily attached and detached from the optical element. The direct engagement features allow for reversible connection through simple engagement and disengagement actions, replacing permanent connections (adhesives) or complex mechanical fastenings (screws) with a flexible, reusable engagement mechanism.
Solution Approach 2:
The patent segments the connection function into separate engagement features on the optical element surface and corresponding engagement structures on the component. This segmentation allows the connection to be made and broken easily by engaging or disengaging these separate features, providing both strength during operation and ease of release when needed, without requiring permanent bonding materials.
Data Source
AI summary
A lithography machine includes an optical element, an interface coupled to the optical element, and a component which is separate from the interface. The interface is directly connected to the optical element. The optical element includes an engaging section. The component has a counter engaging section configured to engage with the engaging section of the optical element to connect the component form-fittingly and/or force-fittingly to the optical element.