Recirculation Path for Lithography Process Fluid Verification
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The contamination of process fluids during substrate processing leads to deterioration of electrical properties and inconsistent semiconductor structure control, necessitating effective verification and re-use methods to manage contamination and maintain fluid quality.
Innovation Solution
A recirculation path with a probe for monitoring fluid characteristics and a purification unit for cleaning, integrated with substrate processing tools, allowing for the verification and re-use of process fluids by controlling electrical properties and cleanliness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If process fluids are used once and discarded due to contamination, then the electrical properties and consistency of substrate processing are maintained, but the cost increases and resource waste occurs
Solution Approach 1:
The patent implements a recirculation system that recovers process fluids from the substrate processing tool, filters out contaminants including particles and photochemical by-products, and returns the purified fluid to the tool for reuse. This resolves the contradiction by maintaining fluid quality through recovery and purification while enabling continuous reuse, thereby reducing waste without compromising processing consistency
Solution Approach 2:
The recirculation path enables continuous circulation and reuse of process fluids through the processing tool, maintaining consistent electrical properties through ongoing purification. This eliminates the need for periodic fluid replacement while ensuring continuous quality control, resolving the contradiction between maintaining reliability and reducing substance loss
2Loss of substance
If process fluids are purified and re-used through a recirculation path, then cost is reduced and resource efficiency is improved, but the device complexity increases
Solution Approach 1:
The patent merges the recirculation path with the existing substrate processing tool, integrating the collection unit, probe, and purification unit into the tool's fluid handling system. This integration approach reduces device complexity by combining multiple functions into a unified system rather than adding separate standalone components
Solution Approach 2:
The system incorporates a probe that automatically monitors fluid characteristics and controls the purification process, enabling the recirculation system to self-regulate fluid quality. This automation reduces operational complexity and makes the system more manageable despite the added components
3Manufacturing precision
If process fluids are monitored and purified to maintain quality, then consistency of substrate processing is maintained, but the device complexity and operational complexity increase
Solution Approach 1:
The probe continuously monitors fluid characteristics such as electrical properties and provides real-time feedback to control the purification process. This feedback mechanism ensures that fluid quality remains within specified ranges, maintaining substrate processing consistency while automating the verification process to minimize operational complexity
Solution Approach 2:
The patent uses electrical measurements through the probe to monitor fluid quality instead of manual sampling and analysis. This substitution of mechanical/chemical verification with electrical sensing simplifies the verification process and enables continuous automated monitoring, maintaining precision while reducing operational complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the re-use of process fluids, reducing costs and maintaining consistency, while ensuring the quality of fluids used in substrate processing by purifying and reconditioning them to meet substrate processing requirements.
Implementation Method 1
determining a first resistivity of the fluid
Implementation Method 2
the purification unit for changing a characteristic of the fluid
Data Source
AI summary
Embodiments of the present disclosure generally relate to apparatus and methods for verification and re-use of process fluids. The apparatus generally includes a tool for performing lithography, and a recirculation path coupled to the tool. The recirculation path generally includes a collection unit coupled at first end to a first end of the tool, and a probe coupled at a first end to a second end of the collection unit, the probe for determining one or more characteristics of a fluid flowing from the tool. The recirculation path of the apparatus further generally includes a purification unit coupled at a first end to a third end of the collection unit, the purification unit further coupled at a second end to a second end of the probe, the purification unit for changing a characteristic of the fluid.