Lithography Illumination Device Using Segmented Partial Beams
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Solution Overview
Problem
Current devices for illuminating masks in lithographic applications require high power light sources and complex cooling due to excessive light absorption by opaque regions, leading to inefficient energy use.
Innovation Solution
A device that divides light into multiple partial beams with spacing, using arrays of lenses to specifically illuminate transparent sections of the mask, reducing light absorption by opaque regions and allowing for lower power light sources.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If a single large beam of light is used to illuminate the mask, then the illumination intensity is sufficient, but a large fraction of light energy is absorbed by the opaque regions requiring complex cooling
Solution Approach 1:
The patent divides the single large light beam into multiple separate partial beams using an array of lenses. Each lens in the array focuses light onto corresponding transparent sections of the mask, ensuring that only the necessary areas receive illumination while opaque regions remain unilluminated, thereby reducing energy absorption.
2Illumination intensity
If high power light sources are used to ensure sufficient illumination, then the illumination intensity is adequate, but energy consumption increases significantly
Solution Approach 1:
By segmenting the light beam into multiple focused partial beams that correspond to transparent sections, the system achieves sufficient illumination intensity without requiring high power light sources. The array of lenses distributes the light from lower power sources efficiently to the required locations.
Solution Approach 2:
The patent applies local quality by focusing light only onto the transparent sections where it is needed, rather than illuminating the entire mask uniformly. This localized illumination approach reduces overall energy consumption while maintaining adequate intensity at the required locations.
3Stability of the object's composition
If the light beam covers the entire mask area, then illumination is uniform, but the opaque regions absorb excessive light requiring complex cooling systems
Solution Approach 1:
The patent segments the illumination into multiple discrete partial beams that correspond to transparent sections, leaving opaque regions unilluminated. This segmentation naturally prevents excessive heat generation in opaque areas while maintaining uniform illumination where needed.
Solution Approach 2:
The patent extracts the illumination function from the entire mask area and applies it only to the transparent sections through the lens array. By taking out the illumination from opaque regions, the system eliminates the need for complex cooling systems while maintaining illumination uniformity in the relevant areas.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the need for high power light sources and minimizes light absorption by the mask, eliminating the need for complex cooling and enabling more efficient energy use.
Implementation Method 1
the separation means may include at least one first array of first lenses capable of dividing the light into separate partial beams at least with respect to a first direction
Data Source
AI summary
Device for illuminating an area, in particular for illuminating a mask (14), for example for a lithographic application, with at least one light source (1) for producing light (3) that can be used for the illumination, optics means (2) for shaping the light (3) produced by the at least one light source (1), and separation means (4, 4′, 4″) capable of dividing the light (3) to be used for the illumination into several mutually separated partial beams (5), so that these partial beams (5) can illuminate the area to be illuminated with a spacing therebetween. The present invention also relates to a device for applying light to a work area.