Lithography Lens Rebuilding Using Interferometric Profile Copying
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Solution Overview
Problem
Lithography tools in semiconductor manufacturing face challenges with optical lens contamination and damage, leading to performance degradation, high replacement costs, and lengthy installation times due to the complexity of the optical systems, particularly for aspherical lenses.
Innovation Solution
A method for rebuilding damaged lenses using geometrically-desensitized interferometry to measure and replicate the surface profile of the damaged lens, followed by a focused ion beam process to polish and coat the new lens, allowing it to fit the original optical system without replacing the entire lens set.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional lens replacement method is used, then lens performance is restored, but time consumption and cost increase significantly
Solution Approach 1:
The patent creates a digital copy of the damaged lens using interferometry to capture its surface profile, then uses this copy as a template to manufacture a replacement lens. This copying approach preserves the original lens's optical characteristics while enabling faster reproduction compared to designing and manufacturing from scratch.
Solution Approach 2:
The patent performs preliminary measurements and digital modeling of the damaged lens before actual replacement occurs. By capturing the surface profile and creating a digital replica in advance, the system prepares all necessary data for rapid lens fabrication, eliminating time-consuming measurement steps during the replacement process.
2Reliability
If traditional lens replacement method is used, then lens performance is restored, but manufacturing cost increases
Solution Approach 1:
By digitizing the damaged lens profile and using it as a manufacturing template, the system eliminates the need for expensive custom lens design and fabrication processes. The digital copy serves as a reusable asset that can produce multiple replacement lenses at lower cost.
Solution Approach 2:
The patent transforms the physical lens into digital parameters through interferometric measurement, then uses these parameters to control the manufacturing process. This parameter transformation enables precise replication while reducing material waste and manufacturing complexity, thereby lowering costs.
3Reliability
If complex optical system requires full lens set replacement, then system performance is maintained, but device complexity and time increase
Solution Approach 1:
The patent isolates and replaces only the damaged lens element rather than the entire lens set. By measuring and replicating individual lens parameters, the system enables targeted replacement that maintains overall system performance while reducing the scope and complexity of the replacement operation.
Solution Approach 2:
The digital copying approach captures the specific parameters of the damaged lens, allowing for precise replication of that single component. This eliminates the need to replace or reconfigure other lenses in the system, thereby reducing device complexity and installation time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces time and cost by up to 20% compared to traditional methods, enabling faster lens replacement and improved productivity in fabrication facilities.
Implementation Method 1
generating an initial profile of a new lens based on a surface profile of the damaged lens
Implementation Method 2
a fine polishing is performed on the workpiece
Implementation Method 3
a fine polishing is performed on the workpiece
Implementation Method 4
coating the workpiece
Data Source
AI summary
A method includes removing a damaged lens from a lithography tool; generating an initial profile of a new lens based on a surface profile of the damaged lens; optimizing the initial profile of the new lens by simulating an optical property of the new lens in the lithography tool to generate an optimized profile; fabricating the new lens based on the optimized profile; and mounting the new lens in the lithography tool in place of the damaged lens.