Vertical Lifting Assembly for Lithography Module Handling
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Solution Overview
Problem
Lithography systems face challenges in lifting heavy modules during installation or maintenance, as conventional lifting tools like cranes occupy space, extend downtime, and require complex handling, posing risks to vulnerable modules.
Innovation Solution
A vertical lifting assembly with a body equipped with first and second wheels and a track with ramps, allowing the module to be lifted vertically without rotation, occupying less space and enabling easy manual operation, thus reducing the need for cranes and minimizing risk to sensitive components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If a crane or conventional lifting tool is used to lift heavy modules, then the lifting capability is sufficient, but the device occupies space inside or outside the lithography system and extends handling time
Solution Approach 1:
The lifting device transitions from horizontal crane-based lifting to vertical insertion-based lifting by changing the dimension of operation. The body is inserted vertically between the module and support, utilizing the vertical dimension rather than requiring horizontal space for crane operation.
Solution Approach 2:
The lifting function is extracted from the complex crane system and integrated directly into a compact body that fits within the lithography system's existing structure. The body contains all necessary lifting components (wheels, ramps) within a small form factor.
2Force
If a crane is used for lifting modules, then heavy modules can be lifted, but the handling time and downtime are unreasonably extended
Solution Approach 1:
The body is pre-positioned on the track before the module needs to be lifted. The track with ramps is already in place, allowing the body to be quickly inserted and the module to be lifted immediately without requiring setup or positioning time associated with cranes.
Solution Approach 2:
The lifting device is designed to be manually operable without requiring complex external equipment. The body's wheels engage with the track's ramps to automatically provide lifting force through mechanical advantage, eliminating the need for powered crane systems.
3Force
If conventional lifting tools are used, then modules can be lifted, but subsequent handling and removing of connections is required which risks vulnerable modules
Solution Approach 1:
The body acts as an intermediary lifting element that distributes lifting forces through its wheels on the track, rather than directly contacting the module. This indirect lifting mechanism reduces stress concentration and risk of damage to vulnerable module components.
Solution Approach 2:
The track with ramps provides a controlled mechanical advantage system that gradually lifts the module, preventing sudden movements or drops. The ramped surface ensures smooth, controlled lifting that cushions the module against shock loads.
4Force
If a crane is used for lifting, then heavy modules can be lifted, but the device complexity and space requirements increase
Solution Approach 1:
The lifting system is segmented into simple, discrete components: a body with two wheels, a track with ramps, and connection elements. Each component is simple in design, but together they provide effective lifting capability without the complexity of a crane system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The assembly allows for efficient and controlled lifting of heavy modules with minimal space occupation and force, facilitating quick module replacement and reducing the risk of damage, while enabling precise height control and easy transfer to movable carts.
Implementation Method 1
the track comprises a ramp, wherein insertion of the body between the module and the support causes the module to be lifted from the support
Data Source
AI summary
An assembly and a method for lifting a module of a lithography system from its support and a lithography system including such device are provided. The assembly includes a body and a track. The track comprises a ramp. The body is provided with two wheels. The first wheel vertically may extend a distance h further from a central horizontal plane of the body than the second wheel. An axis of the first wheel may be positioned in the horizontal direction at a distance D from an axis of the second wheel. The track may include a first and a second ramp. The first ramp is positioned at a distance D from the second ramp in the horizontal direction and a distance h in the vertical direction. Insertion of the body between the module and the support causes the module to be lifted from the support.