Lithography Mask and Mirror for 3D Object Spatial Resolution
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Solution Overview
Problem
Current stereolithography techniques face limitations in spatial resolution due to the wavelength and optical quality of projection images, and there is a need to simplify the structure and operation of lithography devices for improved 3D object manufacturing.
Innovation Solution
A device and method that involve a mask and radiation source to create a projection image, with the mask moved along an oblique axis forming an angle with the plane to be illuminated, and a mirror to transform this movement into a displacement within the plane, allowing for simultaneous movement in two directions to enhance resolution and coverage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the projection image is moved only in a single direction by moving the mask, then the device structure is simple, but the spatial resolution and coverage are limited
Solution Approach 1:
The patent introduces a second direction of movement for the projection image by adding a mirror that reflects the image from the mask. The mask moves along an oblique axis, and the mirror transforms this movement into displacement in two different directions within the illumination plane, thereby achieving multi-directional coverage without proportionally increasing device complexity
Solution Approach 2:
The mirror acts as an intermediary element between the mask and the illumination plane. It receives the projection image from the mask and redirects it, enabling the transformation of single-direction mask movement into multi-directional image displacement, thus improving spatial resolution and coverage
2Manufacturing precision
If the mask is moved along an oblique axis to improve resolution, then the projection image coverage is enhanced, but the mechanical stability may be compromised
Solution Approach 1:
The mirror serves as a stable intermediary that reflects the projection image. By positioning the mirror on a stable support structure and using it to redirect the image, the system achieves precise multi-directional displacement without requiring the entire mask assembly to move mechanically in complex patterns, thereby maintaining mechanical stability
Solution Approach 2:
The oblique axis movement of the mask combined with mirror reflection creates a geometric transformation that enhances image coverage. The mirror fixed at a specific angle transforms the oblique mask movement into orthogonal displacement components, improving resolution while the fixed mirror position maintains mechanical stability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves spatial resolution and mechanical stability, enabling more precise and efficient manufacturing of 3D objects by allowing the projection image to be moved in multiple directions within the plane, thereby improving the quality and complexity of the objects produced.
Implementation Method 1
a mask and a radiation source arranged to create together a projection image at the output of the mask, means for projecting the projection image onto a plane to be illuminated
Implementation Method 2
means (typically a mirror arranged to reflect towards the plane to be illuminated the projection image from the mask) to transform the movement of the mask having the component along the oblique axis forming the angle with the plane to be illuminated into a displacement of the projection image on the plane to be illuminated
Implementation Method 3
at least one projection image is projected onto a photo-reactive layer, said photo-reactive layer solidifying on the area illuminated by the projection image
Data Source
Figure 1~2
Figure 3~4
Figure 5~8
AI summary
The present invention concerns a method for producing a volume objet by lithography, comprising a projection of the projection image onto a plane to be illuminated (9) of the layer of material, which involves: - moving the mask (3) in a movement having a component (15) along an oblique axis (16) forming an angle (17) with the plane to be illuminated (9), and - transforming a movement of the mask (3) having a component (15) along the oblique axis (16) forming the angle (17) with the plane to be illuminated (9) into a displacement of the projection image (5) on the plane to be illuminated (9) along the first direction (10) of displacement contained in the plane to be illuminated (9) by means of a mirror (6) that reflects the projection image (5) coming from the mask (3) towards the plane to be illuminated (9).